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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3966–3970

Straightness measurements with a reflection confocal optical system—an experimental study

Kiyofumi Matsuda, Maitreyee Roy, Tomoaki Eiju, John W. O’Byrne, and Colin J. R. Sheppard  »View Author Affiliations


Applied Optics, Vol. 41, Issue 19, pp. 3966-3970 (2002)
http://dx.doi.org/10.1364/AO.41.003966


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Abstract

Straightness measurement is an important technique in the field of mechanical engineering. We previously proposed a novel optical method for measuring straightness of motion using reflection confocal optics. The advantage of this method in comparison with the transmission optical systems of others [Opt. Laser Technol. 6, 166 (1974)] is that the lateral displacements in the two axes perpendicular to the optical axis and the rotation angles around all three axes can be measured simultaneously. We demonstrate straightness measurements using reflection confocal optics and show these measurements to be in good agreement with the theory.

© 2002 Optical Society of America

OCIS Codes
(220.1140) Optical design and fabrication : Alignment
(220.2740) Optical design and fabrication : Geometric optical design
(220.4830) Optical design and fabrication : Systems design
(220.4840) Optical design and fabrication : Testing
(220.4880) Optical design and fabrication : Optomechanics

History
Original Manuscript: September 28, 2001
Revised Manuscript: February 20, 2002
Published: July 1, 2002

Citation
Kiyofumi Matsuda, Maitreyee Roy, Tomoaki Eiju, John W. O’Byrne, and Colin J. R. Sheppard, "Straightness measurements with a reflection confocal optical system—an experimental study," Appl. Opt. 41, 3966-3970 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3966


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References

  1. Hewlett-Packard, Laser Precision Measurement System 5526A Operating Manual (Hewlett-Packard, 3000 Hanover Street, Palo Alto, Calif.94304–1185, 1976).
  2. K. Matsuda, K. Tenjinbayashi, T. Kohno, T. Eiju, “Straightness measurement using holographic real time interferometry,” in International Commission for Optics-13Conference Digest, H. Ohzu, ed. (Organizing Committee of ICO-13, Sapporo, Hokkaido, Japan, 1984), pp. 316–317.
  3. M. Yamauchi, K. Matsuda, “Interferometric straightness measurement system using a holographic grating,” Opt. Eng. 33, 1078–1083 (1994). [CrossRef]
  4. K. Takada, H. Takeyama, “Accuracy control of machine-tools by means of independent optical axes,” Ann. CIRP 27, 271–276 (1978).
  5. H. H. Sakuma, H. Wada, “Straightness measurement using a heterodyne moire method,” Precis. Eng. 9, 19–22 (1987). [CrossRef]
  6. K. Matsuda, M. Roy, J. W. O’Byrne, P. W. Fekete, T. Eiju, C. J. R. Sheppard, “Straightness measurements by use of a reflection confocal optical system,” Appl. Opt. 38, 5310–5318 (1999). [CrossRef]
  7. J. M. Burch, D. C. Williams, “A focal lens system for straightness measurement,” Opt. Laser Technol. 6, 166–168 (1974). [CrossRef]
  8. N. Ikawa, S. Shima, H. Morooka, “Laser beam as a straight datum and its application to straightness measurement at nanometer level,” Ann. CIRP 37, 523–526 (1998). [CrossRef]
  9. K. Matsuda, T. H. Barnes, B. F. Oreb, C. J. R. Sheppard, “Position magnifying sensor,” Opt. Commun. 170, 309–318 (1999). [CrossRef]

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