OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3971–3977

Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode

Hideo Takino, Norio Shibata, Hiroshi Itoh, Teruki Kobayashi, Kazuya Yamamura, Yasuhisa Sano, and Yuzo Mori  »View Author Affiliations


Applied Optics, Vol. 41, Issue 19, pp. 3971-3977 (2002)
http://dx.doi.org/10.1364/AO.41.003971


View Full Text Article

Enhanced HTML    Acrobat PDF (260 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We figure optical surfaces by plasma chemical vaporization machining (CVM) with a pipe electrode, in which an rf plasma generated at the electrode tip under approximately atmospheric pressure moves over the surfaces. We propose a shaping method in which the movement of plasma on the surfaces can be determined. Flat and aspheric surfaces are successfully figured with the desired peak-to-valley shape accuracy of 0.1 µm. The root-mean-square roughness of the resultant surfaces is at the subnanometer level. These results confirm that the plasma CVM and the shaping method have the capability to fabricate optics with high accuracy.

© 2002 Optical Society of America

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(220.1250) Optical design and fabrication : Aspherics
(220.4610) Optical design and fabrication : Optical fabrication
(240.6700) Optics at surfaces : Surfaces
(350.4600) Other areas of optics : Optical engineering
(350.5400) Other areas of optics : Plasmas

History
Original Manuscript: July 3, 2001
Revised Manuscript: January 4, 2002
Published: July 1, 2002

Citation
Hideo Takino, Norio Shibata, Hiroshi Itoh, Teruki Kobayashi, Kazuya Yamamura, Yasuhisa Sano, and Yuzo Mori, "Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode," Appl. Opt. 41, 3971-3977 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3971

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited