Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode
Applied Optics, Vol. 41, Issue 19, pp. 3971-3977 (2002)
http://dx.doi.org/10.1364/AO.41.003971
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Abstract
We figure optical surfaces by plasma chemical vaporization machining (CVM) with a pipe electrode, in which an rf plasma generated at the electrode tip under approximately atmospheric pressure moves over the surfaces. We propose a shaping method in which the movement of plasma on the surfaces can be determined. Flat and aspheric surfaces are successfully figured with the desired peak-to-valley shape accuracy of 0.1 μm. The root-mean-square roughness of the resultant surfaces is at the subnanometer level. These results confirm that the plasma CVM and the shaping method have the capability to fabricate optics with high accuracy.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(220.1250) Optical design and fabrication : Aspherics
(220.4610) Optical design and fabrication : Optical fabrication
(240.6700) Optics at surfaces : Surfaces
(350.4600) Other areas of optics : Optical engineering
(350.5400) Other areas of optics : Plasmas
Citation
Hideo Takino, Norio Shibata, Hiroshi Itoh, Teruki Kobayashi, Kazuya Yamamura, Yasuhisa Sano, and Yuzo Mori, "Fabrication of optics by use of plasma chemical vaporization machining with a pipe electrode," Appl. Opt. 41, 3971-3977 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3971
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