iTIRM as a Tool for Qualifying Polishing Processes
Applied Optics, Vol. 41, Issue 19, pp. 4036-4038 (2002)
http://dx.doi.org/10.1364/AO.41.004036
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Abstract
We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the in situ iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston’s law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(220.5450) Optical design and fabrication : Polishing
Citation
Oliver W. Fähnle, Torsten Wons, Evelyn Koch, Sebastién Debruyne, Mark Meeder, Silvia M. Booij, and Joseph J. M. Braat, "iTIRM as a Tool for Qualifying Polishing Processes," Appl. Opt. 41, 4036-4038 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-4036
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