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Applied Optics

Applied Optics


  • Vol. 41, Iss. 20 — Jul. 10, 2002
  • pp: 4148–4156

Absolute measurement of roughness and lateral-correlation length of random surfaces by use of the simplified model of image-speckle contrast

Chuanfu Cheng, Chunxiang Liu, Ningyu Zhang, Tianqing Jia, Ruxin Li, and Zhizhan Xu  »View Author Affiliations

Applied Optics, Vol. 41, Issue 20, pp. 4148-4156 (2002)

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We present a method of image-speckle contrast for the nonprecalibration measurement of the root-mean-square roughness and the lateral-correlation length of random surfaces with Gaussian correlation. We use the simplified model of the speckle fields produced by the weak scattering object in the theoretical analysis. The explicit mathematical relation shows that the saturation value of the image-speckle contrast at a large aperture radius determines the roughness, while the variation of the contrast with the aperture radius determines the lateral-correlation length. In the experimental performance, we specially fabricate the random surface samples with Gaussian correlation. The square of the image-speckle contrast is measured versus the radius of the aperture in the 4f system, and the roughness and the lateral-correlation length are extracted by fitting the theoretical result to the experimental data. Comparison of the measurement with that by an atomic force microscope shows our method has a satisfying accuracy.

© 2002 Optical Society of America

OCIS Codes
(110.1220) Imaging systems : Apertures
(120.6150) Instrumentation, measurement, and metrology : Speckle imaging
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

Original Manuscript: December 3, 2001
Revised Manuscript: March 12, 2002
Published: July 10, 2002

Chuanfu Cheng, Chunxiang Liu, Ningyu Zhang, Tianqing Jia, Ruxin Li, and Zhizhan Xu, "Absolute measurement of roughness and lateral-correlation length of random surfaces by use of the simplified model of image-speckle contrast," Appl. Opt. 41, 4148-4156 (2002)

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