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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 22 — Aug. 1, 2002
  • pp: 4477–4483

Fourier Transform Interferometer Alignment Method

Kenneth A. Goldberg, Patrick Naulleau, and Jeffrey Bokor  »View Author Affiliations


Applied Optics, Vol. 41, Issue 22, pp. 4477-4483 (2002)
http://dx.doi.org/10.1364/AO.41.004477


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Abstract

A rapid and convenient method has been developed to facilitate the alignment of the image-plane components of point-diffraction interferometers, including the phase-shifting point-diffraction interferometer. In real time, the Fourier transform of the detected image is used to calculate a pseudoimage of the electric field in the image plane of the test optic where the critical alignment of various optical components is performed. Reconstruction of the pseudoimage is similar to off-axis, Fourier transform holography. Intermediate steps in the alignment procedure are described. Fine alignment is aided by the introduction and optimization of a global-contrast parameter that is easily calculated from the Fourier transform. Additional applications include the alignment of image-plane apertures in general optical systems, the rapid identification of patterned image-plane alignment marks, and the probing of important image-plane field properties.

© 2002 Optical Society of America

OCIS Codes
(070.2580) Fourier optics and signal processing : Paraxial wave optics
(090.1760) Holography : Computer holography
(120.2880) Instrumentation, measurement, and metrology : Holographic interferometry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(220.4840) Optical design and fabrication : Testing

Citation
Kenneth A. Goldberg, Patrick Naulleau, and Jeffrey Bokor, "Fourier Transform Interferometer Alignment Method," Appl. Opt. 41, 4477-4483 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-22-4477


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References

  1. W. P. Linnik, “A simple interferometer for the investigation of optical systems,” Comptes Radnus de l’Académie des Sciences d’U.R.SS. 1, 208 (1933).
  2. R. N. Smartt and W. H. Steel, “Theory and application of point-diffraction interferometers (telescope testing),” Jpn. J. Appl. Phys. 14 (Suppl.14–1), 351–356 (1975).
  3. R. J. Speer, M. Chrisp, D. Turner, S. Mrowka, and K. Tregidgo, “Grazing incidence interferometry: the use of the Linnik interferometer for testing image-forming reflection systems,” Appl. Opt. 18, 2003–2012 (1979).
  4. G. E. Sommargren, “Diffraction methods raise interferometer accuracy,” Laser Focus World 32, 61–71 (1996).
  5. H. J. Jeong and D. A. Markle, “Point diffraction interferometer and pin mirror for use therewith,” U.S. patent 5,822,066 (13 October 1998).
  6. O. Y. Kwon, “Multichannel phase-shifted interferometer,” Opt. Lett. 9, 59–61 (1984).
  7. C. R. Mercer and K. Creath, “Liquid-crystal point-diffraction interferometer,” Opt. Lett. 19, 916–918 (1994).
  8. H. Medecki, E. Tejnil, K. A. Goldberg, and J. Bokor, “Phase-shifting point diffraction interferometer,” Opt. Lett. 21, 1526–1528 (1996).
  9. P. P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, D. Attwood, and J. Bokor, “Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy,” Appl. Opt. 38, 7252–7263 (1999).
  10. E. Tejnil, K. A. Goldberg, S. H. Lee, H. Medecki, P. J. Batson, P. E. Denham, A. A. MacDowell, J. Bokor, and D. T. Attwood, “At-wavelength interferometry for EUV lithography,” J. Vac. Sci. Technol. B 15, 2455–2461 (1997).
  11. K. A. Goldberg, P. Naulleau, P. Batson, P. Denham, H. Chapman, and J. Bokor, “Extreme ultraviolet alignment and testing of a four mirror aspheric extreme ultraviolet optical system,” J. Vac. Sci. Technol. B 18, 2911–2915 (2000).
  12. D. M. Williamson, “The elusive diffraction limit,” in Extreme Ultraviolet Lithography, Vol. 23 of OSA Proceedings Series, D. T. Attwood and F. Zernike, eds. (Optical Society of America, Washington, D.C., 1994), pp. 68–76.
  13. P. Naulleau, K. A. Goldberg, S. Lee, C. Chang, C. Bresloff, P. Batson, D. Attwood, and J. Bokor, “Characterization of the accuracy of EUV phase-shifting point diffraction interferometry,” in Emerging Lithographic Technologies II, Y. Vladimirski, ed., Proc. SPIE 3331, 114–123 (1998).
  14. P. P. Naulleau and K. A. Goldberg, “A dual-domain point diffraction interferometer,” Appl. Opt. 38, 3523–3533 (1999).
  15. K. A. Goldberg and P. P. Naulleau, “In situ alignment system for phase-shifting point-diffraction interferometry,” U.S. patent 6,118,535 (12 September 2000).
  16. J. W. Goodman, Introduction to Fourier Optics, 2nd ed. (McGraw-Hill, New York, 1988).
  17. E. N. Leith and J. Upatnieks, “Reconstructed wavefronts and communication theory,” J. Opt. Soc. Am. 52, 1123–1130 (1962).
  18. K. A. Goldberg, P. Naulleau, P. J. Batson, P. Denham, E. H. Anderson, J. Bokor, and H. N. Chapman, “EUV interferometry of a four-mirror ring-field EUV optical system,” in Emerging Lithographic Technologies, E. A. Dobisz, ed., Proc. SPIE 3997, 867–873 (2000).
  19. P. Naulleau, K. Goldberg, E. Gullikson, and J. Bokor, “At-wavelength, system-level flare characterization of EUV optical systems,” Appl. Opt. 39, 2941–2947 (2000).
  20. K. A. Goldberg, “EUV Interferometry,” Ph.D. dissertation (University of California, Berkeley, 1997).

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