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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 22 — Aug. 1, 2002
  • pp: 4510–4518

Direct numerical inversion method for kinetic ellipsometric data. I. Presentation of the method and numerical evaluation

Dmitri Kouznetsov, Alfred Hofrichter, and Bernard Drévillon  »View Author Affiliations


Applied Optics, Vol. 41, Issue 22, pp. 4510-4518 (2002)
http://dx.doi.org/10.1364/AO.41.004510


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Abstract

A direct numerical inversion method for the determination of the refractive index and the thickness of the outermost layer of a thin transparent film on top of a multilayer has been developed. This method is based on a second-order Taylor decomposition of the coefficients of the Abelès matrices of the newly grown layer. The variations of the real-time spectroscopic ellipsometry data are expressed as polynomial functions depending on the dielectric constant and the thickness of the newly grown layer. The method is fast, capable of single-wavelength and multiwavelength inversion of continuous as well as discontinuous-index profiles, and can be adapted to many different polarimetric instruments.

© 2002 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(160.4760) Materials : Optical properties
(200.3050) Optics in computing : Information processing
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: April 5, 2001
Revised Manuscript: October 15, 2001
Published: August 1, 2002

Citation
Dmitri Kouznetsov, Alfred Hofrichter, and Bernard Drévillon, "Direct numerical inversion method for kinetic ellipsometric data. I. Presentation of the method and numerical evaluation," Appl. Opt. 41, 4510-4518 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-22-4510

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