Surface-relief transmissive diffractive elements were fabricated by embossing. The master was made by lithography with a self-developing photopolymer. The highly cross-linked structure exhibited by the polymer has made possible the direct replication by thermal embossing of polyethylene substrates. Fabricated elements are meant to work with mid-infrared radiation. The influence of some process variables, related to the performance of the diffractive elements, is analyzed.
© 2002 Optical Society of America
Original Manuscript: November 16, 2001
Revised Manuscript: April 19, 2002
Published: August 1, 2002
Manuel Ornelas-Rodriguez, Sergio Calixto, Yunlong Sheng, and Colette Turck, "Thermal embossing of mid-infrared diffractive optical elements by use of a self-processing photopolymer master," Appl. Opt. 41, 4590-4595 (2002)