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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 23 — Aug. 10, 2002
  • pp: 4876–4883

Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory

Akira Hirabayashi, Hidemitsu Ogawa, and Katsuichi Kitagawa  »View Author Affiliations


Applied Optics, Vol. 41, Issue 23, pp. 4876-4883 (2002)
http://dx.doi.org/10.1364/AO.41.004876


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Abstract

We propose a fast surface-profiling algorithm based on white-light interferometry by use of sampling theory. We first provide a generalized sampling theorem that reconstructs the squared-envelope function of the white-light interferogram from sampled values of the interferogram and then propose the new algorithm based on the theorem. The algorithm extends the sampling interval to 1.425 µm when an optical filter with a center wavelength of 600 nm and a bandwidth of 60 nm is used. The sampling interval is 6–14 times wider than those used in conventional systems. The algorithm has been installed in a commercial system that achieved the world’s fastest scanning speed of 80 µm/s. The height resolution of the system is of the order of 10 nm for a measurement range of greater than 100 µm.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

History
Original Manuscript: January 16, 2002
Revised Manuscript: April 1, 2002
Published: August 10, 2002

Citation
Akira Hirabayashi, Hidemitsu Ogawa, and Katsuichi Kitagawa, "Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory," Appl. Opt. 41, 4876-4883 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-23-4876

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