We present an imaging technique to measure static surface displacements of electronic components. A device is supplied by a transient current that creates a variation of temperature, thus a surface displacement. To measure the latter, a setup that is based on a Michelson interferometer is used. To avoid the phenomenon of speckle and the drawbacks inherent to it, we use a light emitting diode as the light source for the interferometer. The detector is a visible CCD camera that analyzes the optical signal containing the information of surface displacement of the device. Combining images, we extract the amplitude of the surface displacement. Out-of-plane surface-displacement images of a thermoelectric device are presented.
© 2002 Optical Society of America
(000.2190) General : Experimental physics
(110.6820) Imaging systems : Thermal imaging
(120.6810) Instrumentation, measurement, and metrology : Thermal effects
(260.3160) Physical optics : Interference
Stefan Dilhaire, Stéphane Grauby, Sébastien Jorez, Luis David Patino Lopez, Jean-Michel Rampnoux, and Wilfrid Claeys, "Surface Displacement Imaging by Interferometry with a Light Emitting Diode," Appl. Opt. 41, 4996-5001 (2002)