## Prototype Results of a Phase-Shifting Interferometer Capable of Measuring the Complex Index and Profile of a Test Surface

Applied Optics, Vol. 41, Issue 25, pp. 5298-5312 (2002)

http://dx.doi.org/10.1364/AO.41.005298

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### Abstract

Results are presented from a prototype phase-shifting interferometer capable of measuring both the real and the imaginary part of the complex index of refraction and the surface profile of a test surface. The three parameters of interest are extracted from the measured data by maximum-likelihood estimation theory. The performance of the system is quantitatively assessed with Cramer-Rao lower bounds. The results are shown to be strongly dependent on the quantization of the interferograms from the 8-bit CCD camera, the incident electric field amplitude, and the relative amplitude and phase difference of each polarized component through each arm of the interferometer.

© 2002 Optical Society of America

**OCIS Codes**

(100.3010) Image processing : Image reconstruction techniques

(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology

(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry

(120.3180) Instrumentation, measurement, and metrology : Interferometry

(160.4760) Materials : Optical properties

(240.0240) Optics at surfaces : Optics at surfaces

**Citation**

Eric W. Rogala and Harrison H. Barrett, "Prototype Results of a Phase-Shifting Interferometer Capable of Measuring the Complex Index and Profile of a Test Surface," Appl. Opt. **41**, 5298-5312 (2002)

http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-25-5298

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