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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 25 — Sep. 1, 2002
  • pp: 5298–5312

Prototype results of a phase-shifting interferometer capable of measuring the complex index and profile of a test surface

Eric W. Rogala and Harrison H. Barrett  »View Author Affiliations


Applied Optics, Vol. 41, Issue 25, pp. 5298-5312 (2002)
http://dx.doi.org/10.1364/AO.41.005298


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Abstract

Results are presented from a prototype phase-shifting interferometer capable of measuring both the real and the imaginary part of the complex index of refraction and the surface profile of a test surface. The three parameters of interest are extracted from the measured data by maximum-likelihood estimation theory. The performance of the system is quantitatively assessed with Cramer–Rao lower bounds. The results are shown to be strongly dependent on the quantization of the interferograms from the 8-bit CCD camera, the incident electric field amplitude, and the relative amplitude and phase difference of each polarized component through each arm of the interferometer.

© 2002 Optical Society of America

OCIS Codes
(100.3010) Image processing : Image reconstruction techniques
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(160.4760) Materials : Optical properties
(240.0240) Optics at surfaces : Optics at surfaces

History
Original Manuscript: December 17, 2001
Revised Manuscript: May 15, 2002
Published: September 1, 2002

Citation
Eric W. Rogala and Harrison H. Barrett, "Prototype results of a phase-shifting interferometer capable of measuring the complex index and profile of a test surface," Appl. Opt. 41, 5298-5312 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-25-5298

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