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Applied Optics

Applied Optics


  • Vol. 41, Iss. 25 — Sep. 1, 2002
  • pp: 5405–5412

Polarized light scattering by dielectric and metallic spheres on silicon wafers

Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer  »View Author Affiliations

Applied Optics, Vol. 41, Issue 25, pp. 5405-5412 (2002)

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The polarization and intensity of light scattered by monodisperse polystyrene latex and copper spheres, with diameters ranging from 92 to 218 nm, deposited on silicon substrates were measured with 442-, 532-, and 633-nm light. The results are compared with a theory for scattering by a sphere on a surface, originally developed by others [Physica A 137, 209 (1986)], and extended to include coatings on the sphere and the substrate. The results show that accurate calculation of the scattering of light by a metal sphere requires that the near-field interaction between the sphere and its image be included in a complete manner. The normal-incidence approximation does not suffice for this interaction, and the existence of any thin oxide layer on the substrate must be included in the calculation.

© 2002 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(240.0240) Optics at surfaces : Optics at surfaces
(290.0290) Scattering : Scattering
(350.4990) Other areas of optics : Particles

Original Manuscript: April 23, 2002
Revised Manuscript: June 12, 2002
Published: September 1, 2002

Jung Hyeun Kim, Sheryl H. Ehrman, George W. Mulholland, and Thomas A. Germer, "Polarized light scattering by dielectric and metallic spheres on silicon wafers," Appl. Opt. 41, 5405-5412 (2002)

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