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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 26 — Sep. 10, 2002
  • pp: 5503–5511

High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method

Patrick Sandoz, Vincent Bonnans, and Tijani Gharbi  »View Author Affiliations


Applied Optics, Vol. 41, Issue 26, pp. 5503-5511 (2002)
http://dx.doi.org/10.1364/AO.41.005503


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Abstract

We introduced recently phase measurements usually performed in interferometry to the domain of image processing and intelligent vision [IEEE Trans. Instrum. Meas. 49, 867 (2000)]. Our purpose is to sense with a high accuracy the position, orientation, and displacement of two-dimensional (2D) surfaces observed by a static vision system. We report on significant improvements of the method. Experimental measurements reveal a peak-valley noise of approximately 10-2 CCD pixel, corresponding approximately to a 10-3 period of the phase reference pattern. Then the observation of 10 µm scaled features enables an accuracy of a few nm in the position sensing of the phase reference pattern for the extended 2D measurement range.

© 2002 Optical Society of America

OCIS Codes
(100.0100) Image processing : Image processing
(100.5070) Image processing : Phase retrieval
(100.7410) Image processing : Wavelets
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(150.0150) Machine vision : Machine vision
(150.5670) Machine vision : Range finding

History
Original Manuscript: March 6, 2002
Revised Manuscript: May 23, 2002
Published: September 10, 2002

Citation
Patrick Sandoz, Vincent Bonnans, and Tijani Gharbi, "High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method," Appl. Opt. 41, 5503-5511 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-26-5503


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References

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