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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 27 — Sep. 20, 2002
  • pp: 5660–5667

Effect of vaporization and melt ejection on laser machining of silica glass micro-optical components

Gavin A. J. Markillie, Howard J. Baker, Francisco J. Villarreal, and Denis R. Hall  »View Author Affiliations


Applied Optics, Vol. 41, Issue 27, pp. 5660-5667 (2002)
http://dx.doi.org/10.1364/AO.41.005660


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Abstract

A new regime for silica glass machining for micro-optical fabrication applications, which uses pulsed CO2 laser radiation in the 2.5–100-µs pulse width region that has been generated by an acousto-optic modulator, is investigated. A filamentary melt ejection process that generates fibers and significant melt displacement limits machining quality below 30-µs pulse width. Ablation and melt ejection thresholds are quantified relative to pulse width, and the region from 30 to 50 µs is identified for low-threshold, smooth machining without melt displacement and ejection effects.

© 2002 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.3470) Lasers and laser optics : Lasers, carbon dioxide
(160.0160) Materials : Materials
(160.6030) Materials : Silica
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication

History
Original Manuscript: December 5, 2001
Revised Manuscript: June 14, 2002
Published: September 20, 2002

Citation
Gavin A. J. Markillie, Howard J. Baker, Francisco J. Villarreal, and Denis R. Hall, "Effect of vaporization and melt ejection on laser machining of silica glass micro-optical components," Appl. Opt. 41, 5660-5667 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-27-5660

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