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Applied Optics

Applied Optics


  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5896–5904

Microscopic phase-shifting profilometry based on digital micromirror device technology

Chengping Zhang, Peisen S. Huang, and Fu-Pen Chiang  »View Author Affiliations

Applied Optics, Vol. 41, Issue 28, pp. 5896-5904 (2002)

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A microscopic three-dimensional (3-D) shape measurement system based on digital fringe projection has been developed and experimentally investigated. A Digital Micromirror Device along with its illumination optics is integrated into a stereomicroscope, which projects computer-generated fringe patterns with a sinusoidal intensity profile through the microscope objective onto the object surface being measured. The fringe patterns deformed by the object surface are recorded by a CCD camera. The microscopic 3-D shape of the object surface is measured and reconstructed by use of a phase-shifting technique. We discuss design considerations and error analysis of the system. Experimental results successfully demonstrate the capability of this technique for surface profile measurement of rough surfaces at the micrometer level.

© 2002 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Original Manuscript: January 9, 2002
Revised Manuscript: May 14, 2002
Published: October 1, 2002

Chengping Zhang, Peisen S. Huang, and Fu-Pen Chiang, "Microscopic phase-shifting profilometry based on digital micromirror device technology," Appl. Opt. 41, 5896-5904 (2002)

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