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Applied Optics

Applied Optics


  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5905–5912

X-ray–ultraviolet beam splitters for the Michelson interferometer

Franck Delmotte, Marie-Françoise Ravet, Françoise Bridou, Françoise Varnière, Philippe Zeitoun, Sébastien Hubert, Laurent Vanbostal, and Gérard Soullie  »View Author Affiliations

Applied Optics, Vol. 41, Issue 28, pp. 5905-5912 (2002)

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With the aim of realizing a Michelson interferometer working at 13.9 nm, we have developed a symmetrical beam splitter with multilayers deposited on the front and back sides of a silicon nitride membrane. On the basis of the experimental optical properties of the membrane, simulations have been performed to define the multilayer structure that provides the highest reflectivity-transmission product. Optimized Mo-Si multilayers have been successfully deposited on both sides of the membrane by use of the ion-beam sputtering technique, with a thickness-period reproducibility of 0.1 nm. Measurements by means of synchrotron radiation at 13.9 nm and at an angle of 45° provide a reflectivity of 14.2% and a transmission of 15.2% for a 60% s-polarized light, close to the simulated values. Such a beam splitter has been used for x-ray laser Michelson interferometry at 13.9 nm. The first interferogram is discussed.

© 2002 Optical Society of America

OCIS Codes
(230.1360) Optical devices : Beam splitters
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties
(340.0340) X-ray optics : X-ray optics
(340.7450) X-ray optics : X-ray interferometry

Original Manuscript: January 2, 2002
Revised Manuscript: June 25, 2002
Published: October 1, 2002

Franck Delmotte, Marie-Françoise Ravet, Françoise Bridou, Françoise Varnière, Philippe Zeitoun, Sébastien Hubert, Laurent Vanbostal, and Gérard Soullie, "X-ray–ultraviolet beam splitters for the Michelson interferometer," Appl. Opt. 41, 5905-5912 (2002)

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