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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5921–5928

Absolute distance measurement by two-point-diffraction interferometry

Hyug-Gyo Rhee and Seung-Woo Kim  »View Author Affiliations


Applied Optics, Vol. 41, Issue 28, pp. 5921-5928 (2002)
http://dx.doi.org/10.1364/AO.41.005921


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Abstract

We present a point-diffraction interferometer that has been specially devised to perform absolute distance measurements in three dimensions. It is composed of two main parts: One is a target that moves in three dimensions, and the other is a stationary two-dimensional array of photodetectors. The target is made of point-diffraction sources that emit two spherical wave fronts, whose interference is monitored by the photodetectors. Application of a phase-shifting technique allows the phase values of the photodetectors to be precisely measured, which are then fitted to a geometric model of multilateration so as to determine the xyz location of the target by minimization of least-squares errors. Experimental results show that the proposed diffraction interferometer is capable of measuring the xyz coordinates of the target with a volumetric uncertainty of less than 1.0 µm over a working volume of a 100-mm side.

© 2002 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(060.2310) Fiber optics and optical communications : Fiber optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

History
Original Manuscript: April 28, 2002
Revised Manuscript: July 2, 2002
Published: October 1, 2002

Citation
Hyug-Gyo Rhee and Seung-Woo Kim, "Absolute distance measurement by two-point-diffraction interferometry," Appl. Opt. 41, 5921-5928 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-28-5921


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