OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5921–5928

Absolute distance measurement by two-point-diffraction interferometry

Hyug-Gyo Rhee and Seung-Woo Kim  »View Author Affiliations

Applied Optics, Vol. 41, Issue 28, pp. 5921-5928 (2002)

View Full Text Article

Enhanced HTML    Acrobat PDF (254 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We present a point-diffraction interferometer that has been specially devised to perform absolute distance measurements in three dimensions. It is composed of two main parts: One is a target that moves in three dimensions, and the other is a stationary two-dimensional array of photodetectors. The target is made of point-diffraction sources that emit two spherical wave fronts, whose interference is monitored by the photodetectors. Application of a phase-shifting technique allows the phase values of the photodetectors to be precisely measured, which are then fitted to a geometric model of multilateration so as to determine the xyz location of the target by minimization of least-squares errors. Experimental results show that the proposed diffraction interferometer is capable of measuring the xyz coordinates of the target with a volumetric uncertainty of less than 1.0 µm over a working volume of a 100-mm side.

© 2002 Optical Society of America

OCIS Codes
(050.5080) Diffraction and gratings : Phase shift
(060.2310) Fiber optics and optical communications : Fiber optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Original Manuscript: April 28, 2002
Revised Manuscript: July 2, 2002
Published: October 1, 2002

Hyug-Gyo Rhee and Seung-Woo Kim, "Absolute distance measurement by two-point-diffraction interferometry," Appl. Opt. 41, 5921-5928 (2002)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. Malacara, Optical Shop Testing, 2nd ed. (Wiley, New York, 1992).
  2. M. Born, E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1989), Chap. 7.
  3. J. C. Wyant, “Interferometric optical metrology: basic principles and new systems,” Laser Focus 18, 65–71 (1982).
  4. K. Freischlad, C. L. Koliopoulos, “Fourier description of digital phase-measuring interferometry,” J. Opt. Soc. Am. A 7, 542–551 (1990). [CrossRef]
  5. P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Appl. Opt. 34, 4723–4730 (1995). [CrossRef]
  6. N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4, 907–926 (1993), and references therein. [CrossRef]
  7. P. de Groot, “Grating interferometer for flatness testing,” Opt. Lett. 21, 228–230 (1996). [CrossRef] [PubMed]
  8. C. C. Williams, H. K. Wickramasinghe, “Optical ranging by wavelength multiplexed interferometry,” J. Appl. Phys. 60, 1900–1903 (1986). [CrossRef]
  9. Z. Sodnik, E. Fischer, T. Ittner, H. J. Tiziani, “Two-wavelength double heterodyne interferometry using a matched grating technique,” Appl. Opt. 30, 3139–3144 (1991). [CrossRef] [PubMed]
  10. T. Li, A. Wang, K. Murphy, R. Claus, “White-light scanning fiber Michelson interferometer for absolute position-distance measurement,” Opt. Lett. 20, 785–787 (1995). [CrossRef] [PubMed]
  11. U. Schnell, R. Dandliker, “Dispersive white-light interferometry for absolute distance measurement with dielectric multilayer systems on the target,” Opt. Lett. 21, 528–530 (1996). [CrossRef] [PubMed]
  12. H. Kikuta, K. Iwata, R. Nagata, “Distance measurement by the wavelength shift of laser diode light,” Appl. Opt. 25, 2976–2980 (1986). [CrossRef] [PubMed]
  13. H. Kikuta, K. Iwata, R. Nagata, “Absolute distance measurement by wavelength shift interferometry with a laser diode light: some systematic error sources,” Appl. Opt. 26, 1654–1660 (1987). [CrossRef] [PubMed]
  14. A. J. den Boef, “Interferometric laser rangefinder using a frequency modulated diode laser,” Appl. Opt. 26, 4545–4550 (1987). [CrossRef]
  15. E. Fischer, E. Dalhoff, S. Heim, U. Hofbauer, H. J. Tiziani, “Absolute interferometric distance measurement using a FM-demodulation technique,” Appl. Opt. 34, 5589–5594 (1995). [CrossRef] [PubMed]
  16. J. A. Stone, A. Stejskal, L. Howard, “Absolute interferometry with a 670-nm external cavity diode laser,” Appl. Opt. 38, 5981–5994 (1999). [CrossRef]
  17. S. W. Kim, “New design of precision CMM based upon volumetric phase-measuring interferometry,” Ann. CIRP 51, 357–360 (2001). [CrossRef]
  18. O. Nakamura, M. Goto, K. Toyoda, Y. Tanimura, T. Kurosawa, “Development of a coordinate measuring system with tracking laser interferometer,” Ann. CIRP 40, 523–526 (1991). [CrossRef]
  19. E. B. Hughes, A. Wilson, G. N. Peggs, “Design of a high-accuracy CMM based on multi-lateration techniques,” Ann. CIRP 49, 391–394 (2000). [CrossRef]
  20. A. D. Belegundu, T. R. Chandrupatla, Optimization Concepts and Applications in Engineering (Prentice-Hall, Upper Saddle River, N.J., 1999), pp. 74–79.
  21. J. E. Dennis, R. B. Schnabel, Numerical Methods for Unconstrained Optimization and Nonlinear Equations (Prentice-Hall, Englewood Cliffs, N.J., 1983), pp. 116–133.
  22. A. Ishimaru, Electromagnetic Wave Propagation, Radiation, and Scattering (Prentice-Hall, Englewood Cliffs, N.J., 1991), pp. 156–161.
  23. S. Kimura, T. Wilson, “Confocal scanning optical microscope using single-mode fiber for signal detection,” Appl. Opt. 30, 2143–2150 (1991). [CrossRef] [PubMed]
  24. I.-B. Kong, S.-W. Kim, “General algorithm of phase-shifting interferometry by iterative least-squares fitting,” Opt. Eng. 34, 183–188 (1995). [CrossRef]
  25. K. A. Goldberg, J. Bokor, “Fourier-transform method of phase-shift determination,” Appl. Opt. 40, 2886–2894 (2001). [CrossRef]
  26. J. B. Bryan, “The Abbe principle revisited: an updated interpretation, Precis. Eng. 1, 129–132 (1979).
  27. International Organization for Standardization, “Guide to the expression of uncertainty in measurement,” in International Vocabulary of Basic and General Terms in Metrology, 2nd ed. (International Organization for Standardization, Geneva, Switzerland, 1993).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited