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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5933–5937

Dual-wavelength interferometric technique with subnanometric resolution

Benyong Chen, Xiaohui Cheng, and Dacheng Li  »View Author Affiliations


Applied Optics, Vol. 41, Issue 28, pp. 5933-5937 (2002)
http://dx.doi.org/10.1364/AO.41.005933


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Abstract

A new fringe subdivision method that employs a large synthetic wavelength to subdivide fringes formed by a small single wavelength is proposed. Based on this subdivision method, we demonstrate a novel dual-wavelength interferometric technique with subnanometric resolution, whose potential fringe subdivision factor derived from an evaluation of the interferometer can reach up to 1/440,000. Theoretical analysis and experimental results with a resolution of 0.05 nm are presented to show the feasibility of the interferometric technique.

© 2002 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

History
Original Manuscript: March 8, 2002
Revised Manuscript: June 18, 2002
Published: October 1, 2002

Citation
Benyong Chen, Xiaohui Cheng, and Dacheng Li, "Dual-wavelength interferometric technique with subnanometric resolution," Appl. Opt. 41, 5933-5937 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-28-5933


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References

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