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Applied Optics

Applied Optics


  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5938–5942

Two-longitudinal-mode He-Ne laser for heterodyne interferometers to measure displacement

Min-Seok Kim and Seung-Woo Kim  »View Author Affiliations

Applied Optics, Vol. 41, Issue 28, pp. 5938-5942 (2002)

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We propose a new configuration for a high-resolution heterodyne interferometer that employs a two-longitudinal-mode He-Ne laser with an intermode beat frequency of 600–1000 MHz. The high beat frequency is downconverted to 5 MHz such that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nm. A thermal control scheme is adopted to stabilize the cavity length of the He-Ne plasma tube such that a frequency stability of 2 parts in 109 is obtained by suppression of frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy. This two-longitudinal-mode He-Ne laser yields a high output power of 2.0 mW, which permits multiple measurements of as many as 10 machine axes simultaneously.

© 2002 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(140.3460) Lasers and laser optics : Lasers

Original Manuscript: October 6, 2001
Revised Manuscript: June 17, 2002
Published: October 1, 2002

Min-Seok Kim and Seung-Woo Kim, "Two-longitudinal-mode He-Ne laser for heterodyne interferometers to measure displacement," Appl. Opt. 41, 5938-5942 (2002)

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