OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5979–5983

Extreme-ultraviolet thin-film interference in an Al-Mg-Al multiple-layer transmission filter

John F. Seely  »View Author Affiliations


Applied Optics, Vol. 41, Issue 28, pp. 5979-5983 (2002)
http://dx.doi.org/10.1364/AO.41.005979


View Full Text Article

Enhanced HTML    Acrobat PDF (192 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Thin-film interference has been observed in the transmittance of a filter consisting of 263.5-nm-thick magnesium with a 32.2-nm-thick aluminum layer on each side. The transmittance, measured by synchrotron radiation, has an oscillatory behavior in the 25–70-nm wavelength range. On the basis of the calculation of the transmittance, the oscillatory behavior results from interference associated with the relatively transmissive magnesium and aluminum layers and the reflection from the oxidized aluminum surface layers. The bandpass performance of magnesium and aluminum layers deposited on a silicon photodiode detector is presented.

© 2002 Optical Society of America

OCIS Codes
(260.3160) Physical optics : Interference
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: January 29, 2002
Revised Manuscript: June 21, 2002
Published: October 1, 2002

Citation
John F. Seely, "Extreme-ultraviolet thin-film interference in an Al-Mg-Al multiple-layer transmission filter," Appl. Opt. 41, 5979-5983 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-28-5979

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited