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Applied Optics

Applied Optics


  • Vol. 41, Iss. 28 — Oct. 1, 2002
  • pp: 5979–5983

Extreme-ultraviolet thin-film interference in an Al-Mg-Al multiple-layer transmission filter

John F. Seely  »View Author Affiliations

Applied Optics, Vol. 41, Issue 28, pp. 5979-5983 (2002)

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Thin-film interference has been observed in the transmittance of a filter consisting of 263.5-nm-thick magnesium with a 32.2-nm-thick aluminum layer on each side. The transmittance, measured by synchrotron radiation, has an oscillatory behavior in the 25–70-nm wavelength range. On the basis of the calculation of the transmittance, the oscillatory behavior results from interference associated with the relatively transmissive magnesium and aluminum layers and the reflection from the oxidized aluminum surface layers. The bandpass performance of magnesium and aluminum layers deposited on a silicon photodiode detector is presented.

© 2002 Optical Society of America

OCIS Codes
(260.3160) Physical optics : Interference
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: January 29, 2002
Revised Manuscript: June 21, 2002
Published: October 1, 2002

John F. Seely, "Extreme-ultraviolet thin-film interference in an Al-Mg-Al multiple-layer transmission filter," Appl. Opt. 41, 5979-5983 (2002)

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