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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 29 — Oct. 10, 2002
  • pp: 6200–6210

Diversity detection of speckles for double-wavelength interferometry on rough surfaces

Johannes Trautner and Gerd Leuchs  »View Author Affiliations


Applied Optics, Vol. 41, Issue 29, pp. 6200-6210 (2002)
http://dx.doi.org/10.1364/AO.41.006200


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Abstract

When the topography of a rough surface is measured with a double-wavelength interferometer, the phase error of the signal corresponding to the synthetic wavelength increases in the vicinity of dark speckles. To overcome this problem we perform an amplitude-dependent averaging of the synthetic phase over independent speckles (diversity detection). We either use spatially neighboring speckles or in the case of depolarizing surfaces, we use speckles of the same spatial mode, but with orthogonal polarizations. For the latter case the lateral resolution stays unaffected. The reduction of the speckle noise is demonstrated experimentally for a laterally scanning double-wavelength interferometer with superheterodyne detection of the synthetic phase.

© 2002 Optical Society of America

OCIS Codes
(110.6880) Imaging systems : Three-dimensional image acquisition
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6160) Instrumentation, measurement, and metrology : Speckle interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

History
Original Manuscript: March 28, 2002
Revised Manuscript: June 18, 2002
Published: October 10, 2002

Citation
Johannes Trautner and Gerd Leuchs, "Diversity detection of speckles for double-wavelength interferometry on rough surfaces," Appl. Opt. 41, 6200-6210 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-29-6200


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