An optimization method for the sensitivity of diffraction efficiency measurements is presented. I define the sensitivity as the estimation precision of the grating parameters. The optimization method called sensitivity analysis for fitting scans all the possible measurement configurations and selects the configuration that yields the best sensitivity. The scan is made over the domain of the experimental parameters of the arrangement, such as the azimuth angle of the grating and the orientation angles of the analyzer and the polarizer. These parameters can be freely varied, and among the multitude of possible combinations there is one configuration that provides optimum sensitivity. Comparison with experimental results reveals a qualitative agreement between theory and practice.
© 2002 Optical Society of America
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.5700) Instrumentation, measurement, and metrology : Reflection
(260.2130) Physical optics : Ellipsometry and polarimetry
(260.5430) Physical optics : Polarization
Petre C. Logofătu, "Sensitivity Analysis of Grating Parameter Estimation," Appl. Opt. 41, 7179-7186 (2002)