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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 35 — Dec. 10, 2002
  • pp: 7384–7389

Diffractive optical elements based on Fourier optical techniques: a new class of optics for extreme ultraviolet and soft x-ray wavelengths

Chang Chang, Patrick Naulleau, Erik Anderson, Kristine Rosfjord, and David Attwood  »View Author Affiliations


Applied Optics, Vol. 41, Issue 35, pp. 7384-7389 (2002)
http://dx.doi.org/10.1364/AO.41.007384


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Abstract

A diffractive optical element, based on Fourier optics techniques, for use in extreme ultraviolet/soft x-ray experiments has been fabricated and demonstrated. This diffractive optical element, when illuminated by a uniform plane wave, will produce two symmetric off-axis first-order foci suitable for interferometric experiments. The efficiency of this optical element and its use in direct interferometric determination of optical constants are also discussed. Its use in direct interferometric determination of optical constants is also referenced. Its use opens a new era in the use of sophisticated optical techniques at short wavelengths.

© 2002 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(070.2580) Fourier optics and signal processing : Paraxial wave optics

History
Original Manuscript: March 17, 2002
Revised Manuscript: June 28, 2002
Published: December 10, 2002

Citation
Chang Chang, Patrick Naulleau, Erik Anderson, Kristine Rosfjord, and David Attwood, "Diffractive optical elements based on Fourier optical techniques: a new class of optics for extreme ultraviolet and soft x-ray wavelengths," Appl. Opt. 41, 7384-7389 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-35-7384


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References

  1. D. T. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University, Cambridge, U.K., 1999).
  2. C. Chang, P. Naulleau, E. H. Anderson, E. M. Gullikson, K. A. Goldberg, D. Attwood, “Direct index of refraction measurement at extreme ultraviolet wavelength region with a novel interferometer,” Opt. Lett. 27, 1028–1030 (2002). [CrossRef]
  3. J. W. Goodman, Introduction to Fourier Optics, 2nd ed., McGraw-Hill, New York, 1996, Chap. 5, Problem 14.
  4. E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. Chao, A. Lucero, L. Johnson, D. Attwood, “Nanofabrication and diffractive optics for high-resolution X-ray applications,” J. Vac. Sci. Technol. B 18, 2970–2985 (2000). [CrossRef]
  5. D. T. Attwood, P. Naulleau, K. A. Goldberg, E. Tejnil, C. Chang, R. Beguiristain, P. Batson, J. Bokor, E. M. Gullikson, M. Koike, H. Medecki, J. H. Underwood, “Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions,” IEEE J. Quantum Electron. 35, 709–720 (1999). [CrossRef]

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