We applied a Mo/B4C multilayer coating to a laminar holographic grating with 2400 grooves/mm and a 1-m radius of curvature. By use of synchrotron soft x rays the multilayer-coated grating was evaluated to have diffraction efficiencies of 3.1% and 0.017% for s- and p-polarized radiation, respectively, at a 6.7-nm wavelength at a 45.35° grazing angle of incidence in the +1 (inside) grating order. Thus the polarizance was estimated to be 98.9% at least. The zero-order peak was suppressed by the destructive interference caused by the groove profile.
© 2002 Optical Society of America
Original Manuscript: February 6, 2001
Revised Manuscript: August 30, 2001
Published: February 1, 2002
Sadayuki Ishikawa, Takashi Imazono, Tadashi Hatano, Mihiro Yanagihara, and Makoto Watanabe, "Efficiency and polarization performance of a multilayer-coated laminar grating in the 6.5–6.9-nm wavelength region," Appl. Opt. 41, 763-767 (2002)