The design and operation of a noncontact surface profilometry system based on the time-correlated single-photon-counting technique are described. This system has a robust optomechanical design and uses an eye-safe laser that makes it particularly suitable for operation in an uncontrolled industrial environment. The sensitivity of the photon-counting technique permits its use on a variety of target materials, and its mode of operation does not require the continual presence of an operator. The system described has been optimized for a 1–25-m standoff, has a distance repeatability of <30 μm, and has a transverse spatial resolution of ~60 μm at a 2-m standoff and ~400 μm at a 13-m standoff.
© 2002 Optical Society of America
John Massa, Gerald Buller, Andrew Walker, George Smith, Sergio Cova, Manickam Umasuthan, and Andrew Wallace, "Optical Design and Evaluation of a Three-Dimensional Imaging and Ranging System Based on Time-Correlated Single-Photon Counting," Appl. Opt. 41, 1063-1070 (2002)