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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 7 — Mar. 1, 2002
  • pp: 1315–1322

Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness

Hideki Maruyama, Shogo Inoue, Teruki Mitsuyama, Masato Ohmi, and Masamitsu Haruna  »View Author Affiliations


Applied Optics, Vol. 41, Issue 7, pp. 1315-1322 (2002)
http://dx.doi.org/10.1364/AO.41.001315


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Abstract

We have developed a low-coherence interferometer system used for the simultaneous measurement of refractive index n and thickness t of transparent plates. Both the phase index n p and group index n g can be determined automatically in a wide thickness range of from 10 µm to a few millimeters. Two unique techniques are presented to measure n p , n g , and t simultaneously. One allows us to determine n p , n g , and t accurately by using a special sample holder, in which the measurement accuracy is 0.3% for the thickness t above 0.1 mm. In the other technique the chromatic dispersion δn of index is approximately expressed as a function of (n p - 1) on the basis of measured values of n p and n g for a variety of materials, and then the simultaneous measurement is performed with a normal sample holder. In addition, a measurement accuracy of less than 1% is achieved even when the sample is as thin as 20 µm. The measurement time is also 3 min or more.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(120.5710) Instrumentation, measurement, and metrology : Refraction

History
Original Manuscript: June 8, 2001
Revised Manuscript: November 19, 2001
Published: March 1, 2002

Citation
Hideki Maruyama, Shogo Inoue, Teruki Mitsuyama, Masato Ohmi, and Masamitsu Haruna, "Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness," Appl. Opt. 41, 1315-1322 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-7-1315

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