We have developed a low-coherence interferometer system used for the simultaneous measurement of refractive index n and thickness t of transparent plates. Both the phase index n_p and group index n_g can be determined automatically in a wide thickness range of from 10 μm to a few millimeters. Two unique techniques are presented to measure n_p, n_g, and t simultaneously. One allows us to determine n_p, n_g, and t accurately by using a special sample holder, in which the measurement accuracy is 0.3% for the thickness t above 0.1 mm. In the other technique the chromatic dispersion δn of index is approximately expressed as a function of (n_p − 1) on the basis of measured values of n_p and n_g for a variety of materials, and then the simultaneous measurement is performed with a normal sample holder. In addition, a measurement accuracy of less than 1% is achieved even when the sample is as thin as 20 μm. The measurement time is also 3 min or more.

© 2002 Optical Society of America

[Optical Society of America ]

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