Experimental comparison of a liquid-crystal point-diffraction interferometer (LCPDI) and a commercial phase-shifting interferometer and methods to improve LCPDI accuracy
Applied Optics, Vol. 41, Issue 7, pp. 1353-1365 (2002)
http://dx.doi.org/10.1364/AO.41.001353
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Abstract
We compare the phase measurements of a fused-silica witness sample made with a liquid-crystal point-diffraction interferometer (LCPDI) with measurements made with a Zygo Mark IV xp phase-shifting interferometer and find close agreement. Two phase-shift-error sources in the LCPDI that contribute to measurement discrepancies are frame-to-frame intensity changes caused by the dichroism of the dye and alignment distortions of the host liquid crystal. An empirical model of the phase-shift error caused by the host alignment distortions is presented and used to investigate the performance of two different phase-detection algorithms. It is suggested that by proper choice of LCPDI fabrication parameters and phase-acquisition methods, the device’s accuracy can be significantly improved.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(160.1190) Materials : Anisotropic optical materials
(160.3710) Materials : Liquid crystals
(220.4840) Optical design and fabrication : Testing
(230.3720) Optical devices : Liquid-crystal devices
Citation
Mark J. Guardalben, Lutao Ning, Nieraj Jain, Devon J. Battaglia, and Kenneth L. Marshall, "Experimental comparison of a liquid-crystal point-diffraction interferometer (LCPDI) and a commercial phase-shifting interferometer and methods to improve LCPDI accuracy," Appl. Opt. 41, 1353-1365 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-7-1353
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