OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 42, Iss. 1 — Jan. 1, 2003
  • pp: 38–44

Optimization of azimuth angle settings in polarizer–compensator–sample–analyzer off-null ellipsometry

Guoliang Wang, Hans Arwin, and Roger Jansson  »View Author Affiliations

Applied Optics, Vol. 42, Issue 1, pp. 38-44 (2003)

View Full Text Article

Enhanced HTML    Acrobat PDF (153 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The dependence of the azimuth angle settings on the change in off-null intensity of a polarizer-compensator-sample-analyzer ellipsometer owing to changes in sample properties is studied. First, a closed-form expression for the relationship between azimuth angles that fulfill the null condition is presented. An approximation for the off-null light intensity near null that is valid for small changes of the p- and s-reflection coefficients of an isotropic sample is then derived. This approximation shows that the intensity change near the null can be described by changes in the ellipsometric parameters tan ψ and Δ only. Expressions for finding the azimuth angle that gives the maximum possible intensity change for a given change in the sample parameters are also derived. The importance of optimization of azimuth angle settings for different samples is investigated and found to depend on tan ψ. Numerical and experimental results chosen from the investigation of gas sensors based on porous silicon are included to verify the approximations as well as the optimization.

© 2003 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5240) Instrumentation, measurement, and metrology : Photometry
(260.2130) Physical optics : Ellipsometry and polarimetry

Original Manuscript: February 4, 2002
Revised Manuscript: June 10, 2002
Published: January 1, 2003

Guoliang Wang, Hans Arwin, and Roger Jansson, "Optimization of azimuth angle settings in polarizer–compensator–sample–analyzer off-null ellipsometry," Appl. Opt. 42, 38-44 (2003)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. K. Vedam, “Spectroscopic ellipsometry: a historical overview,” Thin Solid Films 313–314, 1–9 (1998). [CrossRef]
  2. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977).
  3. D. L. Confer, R. M. A. Azzam, N. M. Bashara, “Ellipsometer nulling: convergence and speed,” Appl. Opt. 15, 2568–2575 (1976). [CrossRef] [PubMed]
  4. P. A. Cuypers, W. T. Hermens, H. C. Hemker, “Ellipsometry as a tool to study protein films at liquid-solid interfaces,” Anal. Biochem. 84, 56–57 (1978). [CrossRef] [PubMed]
  5. H. Arwin, S. Welin-Klintström, R. Jansson, “Off-null ellipsometry revisited: basic considerations for measuring surface concentrations at solid/liquid interfaces,” J. Colloid Interface Sci. 156, 377–382 (1993). [CrossRef]
  6. H. Arwin, “Is ellipsometry suitable for sensor applications?” Sens. Actuators A 92, 43–51 (2001). [CrossRef]
  7. S. Guo, R. Rochotzki, I. Lundström, H. Arwin, “Ellipsometric sensitivity to halothane vapors of hexamethydisiloxane plasma polymer layers,” Sens. Actuators B 44, 243–247 (1997). [CrossRef]
  8. S. Zangooie, “Fabrication, characterization and application of porous silicon thin films and multilayered systems,” Ph. D. dissertation 581 (Linköping University, Linköping, Sweden, 1999).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited