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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 1 — Jan. 1, 2003
  • pp: 38–44

Optimization of azimuth angle settings in polarizer–compensator–sample–analyzer off-null ellipsometry

Guoliang Wang, Hans Arwin, and Roger Jansson  »View Author Affiliations


Applied Optics, Vol. 42, Issue 1, pp. 38-44 (2003)
http://dx.doi.org/10.1364/AO.42.000038


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Abstract

The dependence of the azimuth angle settings on the change in off-null intensity of a polarizer-compensator-sample-analyzer ellipsometer owing to changes in sample properties is studied. First, a closed-form expression for the relationship between azimuth angles that fulfill the null condition is presented. An approximation for the off-null light intensity near null that is valid for small changes of the p- and s-reflection coefficients of an isotropic sample is then derived. This approximation shows that the intensity change near the null can be described by changes in the ellipsometric parameters tan ψ and Δ only. Expressions for finding the azimuth angle that gives the maximum possible intensity change for a given change in the sample parameters are also derived. The importance of optimization of azimuth angle settings for different samples is investigated and found to depend on tan ψ. Numerical and experimental results chosen from the investigation of gas sensors based on porous silicon are included to verify the approximations as well as the optimization.

© 2003 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5240) Instrumentation, measurement, and metrology : Photometry
(260.2130) Physical optics : Ellipsometry and polarimetry

History
Original Manuscript: February 4, 2002
Revised Manuscript: June 10, 2002
Published: January 1, 2003

Citation
Guoliang Wang, Hans Arwin, and Roger Jansson, "Optimization of azimuth angle settings in polarizer–compensator–sample–analyzer off-null ellipsometry," Appl. Opt. 42, 38-44 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-1-38

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