Double Sinusoidal Phase-Modulating Distributed-Bragg-Reflector Laser-Diode Interferometer for Distance Measurement
Applied Optics, Vol. 42, Issue 1, pp. 60-66 (2003)
http://dx.doi.org/10.1364/AO.42.000060
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Abstract
A previously proposed double sinusoidal phase-modulating (DSPM) laser-diode interferometer measures distances larger than a half-wavelength by detecting modulation depth. Although it requires a vibrating mirror to provide the second modulation to the interference signal, such vibrations naturally affect measurement accuracy. We propose a static-type DSPM laser-diode interferometer that uses no mechanical modulation. Our experimental results indicate a measurement error of ±1.6 μm.
© 2003 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(140.2020) Lasers and laser optics : Diode lasers
(150.5670) Machine vision : Range finding
Citation
Takamasa Suzuki, Hiromi Suda, and Osami Sasaki, "Double Sinusoidal Phase-Modulating Distributed-Bragg-Reflector Laser-Diode Interferometer for Distance Measurement," Appl. Opt. 42, 60-66 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-1-60
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