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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 1 — Jan. 1, 2003
  • pp: 67–70

Interferometric Sensor Based on Coherent Imaging of Gratings

Anders Magnusson, Kamyar Kazemi Moud, and Sverker Hård  »View Author Affiliations


Applied Optics, Vol. 42, Issue 1, pp. 67-70 (2003)
http://dx.doi.org/10.1364/AO.42.000067


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Abstract

A sensitive interferometric sensor scheme that is based on coherent imaging of a first phase grating onto a second phase grating, their periods accurately matched, is suggested. Experimental data, obtained with a setup based on the suggested scheme, are presented. The sensor was found capable of measuring an angular tilt of a mirror less than 0.5 μrad. Compared with a previously suggested measuring scheme, the novelty of the one presented here is the inclusion of a second set of gratings, which eliminates measurement ambiguity. Some characteristics of the sensor scheme are discussed.

© 2003 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.3180) Instrumentation, measurement, and metrology : Interferometry

Citation
Anders Magnusson, Kamyar Kazemi Moud, and Sverker Hård, "Interferometric Sensor Based on Coherent Imaging of Gratings," Appl. Opt. 42, 67-70 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-1-67

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