OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 42, Iss. 1 — Jan. 1, 2003
  • pp: 67–70

Interferometric sensor based on coherent imaging of gratings

Anders Magnusson, Kamyar Kazemi Moud, and Sverker Hård  »View Author Affiliations

Applied Optics, Vol. 42, Issue 1, pp. 67-70 (2003)

View Full Text Article

Enhanced HTML    Acrobat PDF (196 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A sensitive interferometric sensor scheme that is based on coherent imaging of a first phase grating onto a second phase grating, their periods accurately matched, is suggested. Experimental data, obtained with a setup based on the suggested scheme, are presented. The sensor was found capable of measuring an angular tilt of a mirror less than 0.5 µrad. Compared with a previously suggested measuring scheme, the novelty of the one presented here is the inclusion of a second set of gratings, which eliminates measurement ambiguity. Some characteristics of the sensor scheme are discussed.

© 2003 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.3180) Instrumentation, measurement, and metrology : Interferometry

Original Manuscript: May 23, 2002
Revised Manuscript: September 24, 2002
Published: January 1, 2003

Anders Magnusson, Kamyar Kazemi Moud, and Sverker Hård, "Interferometric sensor based on coherent imaging of gratings," Appl. Opt. 42, 67-70 (2003)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. Post, B. Han, P. Ifju, High Sensitivity Moiré: Experimental Analysis for Mechanics and Material (Springer-Verlag, New York, 1994).
  2. W. Schmann, Holography and Deformation Analysis (Springer-Verlag, Berlin, 1985).
  3. A. Magnusson, S. Hård, “Four-level phase grating generated by combination of two gratings through coherent imaging,” Appl. Opt. 39, 5936–5939 (2000). [CrossRef]
  4. W. A. Nash, Schaum’s Outline of Theory and Problems of Strength of Materials, 4th ed. (McGraw-Hill, New York, 1998).
  5. C. Narayanan, A. B. Buckman, I. Busch-Vishniac, “Noise analysis for position-sensitive detectors,” IEEE Trans. Instrum. Meas. 46, 1137–1144 (1997). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited