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Applied Optics

Applied Optics


  • Vol. 42, Iss. 10 — Apr. 1, 2003
  • pp: 1805–1808

Stabilization improvements of laser-diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement

Masayuki Yokota, Atsuyoshi Asaka, and Toshihiko Yoshino  »View Author Affiliations

Applied Optics, Vol. 42, Issue 10, pp. 1805-1808 (2003)

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To stabilize the phase-shifting Fizeau-type interferometer against environmental disturbances (namely, vibration and temperature variations), the feedback scheme that uses the current-induced frequency modulation of a laser diode (λ = 633 nm) and the two-frequency optical heterodyne method has been investigated, with particular attention to improvement of the achievable stabilization. It is demonstrated that introduction of the proportional-integral control into the feedback system improves stabilization against the proportional control case; e.g., stabilization is improved 5 times for 100-nmp-p vibration at the frequency range at 30 Hz. The surface profile measurement for a sample mirror was conducted with a reproducibility of 6.8 nm in the root mean square under the subwavelength-amplitude vibration at 100 Hz.

© 2003 Optical Society of America

OCIS Codes
(100.2650) Image processing : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(260.3160) Physical optics : Interference

Original Manuscript: August 26, 2002
Revised Manuscript: December 2, 2002
Published: April 1, 2003

Masayuki Yokota, Atsuyoshi Asaka, and Toshihiko Yoshino, "Stabilization improvements of laser-diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement," Appl. Opt. 42, 1805-1808 (2003)

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