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Applied Optics

Applied Optics


  • Vol. 42, Iss. 10 — Apr. 1, 2003
  • pp: 1809–1813

Theoretical measurement uncertainty of white-light interferometry on rough surfaces

Pavel Pavliček and Jan Soubusta  »View Author Affiliations

Applied Optics, Vol. 42, Issue 10, pp. 1809-1813 (2003)

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A great advantage of the white-light interferometry is that it can be used for profile measurement of objects with a rough surface. A speckle pattern that arises in the image plane allows one to observe the interference; however, this pattern is also the source of the measurement uncertainty. We derive the theoretical limits of the longitudinal uncertainty by virtue of the first-order statistics of the speckle pattern. It is shown that this uncertainty depends on the surface roughness of the measured object only; it does not depend on the setup parameters.

© 2003 Optical Society of America

OCIS Codes
(030.6140) Coherence and statistical optics : Speckle
(030.6600) Coherence and statistical optics : Statistical optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: July 30, 2002
Revised Manuscript: October 21, 2002
Published: April 1, 2003

Pavel Pavliček and Jan Soubusta, "Theoretical measurement uncertainty of white-light interferometry on rough surfaces," Appl. Opt. 42, 1809-1813 (2003)

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