A great advantage of the white-light interferometry is that it can be used for profile measurement of objects with a rough surface. A speckle pattern that arises in the image plane allows one to observe the interference; however, this pattern is also the source of the measurement uncertainty. We derive the theoretical limits of the longitudinal uncertainty by virtue of the first-order statistics of the speckle pattern. It is shown that this uncertainty depends on the surface roughness of the measured object only; it does not depend on the setup parameters.
© 2003 Optical Society of America
[Optical Society of America ]
(030.6140) Coherence and statistical optics : Speckle
(030.6600) Coherence and statistical optics : Statistical optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Pavel Pavliček and Jan Soubusta, "Theoretical Measurement Uncertainty of White-Light Interferometry on Rough Surfaces," Appl. Opt. 42, 1809-1813 (2003)