Theoretical Measurement Uncertainty of White-Light Interferometry on Rough Surfaces
Applied Optics, Vol. 42, Issue 10, pp. 1809-1813 (2003)
http://dx.doi.org/10.1364/AO.42.001809
Acrobat PDF (92 KB)
Abstract
A great advantage of the white-light interferometry is that it can be used for profile measurement of objects with a rough surface. A speckle pattern that arises in the image plane allows one to observe the interference; however, this pattern is also the source of the measurement uncertainty. We derive the theoretical limits of the longitudinal uncertainty by virtue of the first-order statistics of the speckle pattern. It is shown that this uncertainty depends on the surface roughness of the measured object only; it does not depend on the setup parameters.
© 2003 Optical Society of America
[Optical Society of America ]
OCIS Codes
(030.6140) Coherence and statistical optics : Speckle
(030.6600) Coherence and statistical optics : Statistical optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Citation
Pavel Pavliček and Jan Soubusta, "Theoretical Measurement Uncertainty of White-Light Interferometry on Rough Surfaces," Appl. Opt. 42, 1809-1813 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-10-1809
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Statistical interferometry based on a fully developed speckle field: an experimental demonstration with noise analysis (JOSAA)
- Spectral and temporal speckle field measurements of a random medium (OL)
- Synthesis of a multiple-peak spatial degree of coherence for imaging through absorbing media (AO)
- White-light interferometry on rough surfaces--measurement uncertainty caused by surface roughness (AO)
- Correlated speckle noise in white-light interferometry: theoretical analysis of measurement uncertainty (AO)
Related Conference Papers
- Using Near-Field Statistics for Interface Characterization
- Perfect Transparency in Opaque Optical Systems
- Velocity estimation accuracy in color doppler optical coherence tomography
- Testing extreme ultraviolet optical systems at-wavelengthwith sub-angstrom accuracy
- Practical interferometric solutions for increasing test coverage for high precision optical manufacturing
« Previous Article | Next Article »
OSA is a member of 