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Applied Optics

Applied Optics


  • Vol. 42, Iss. 11 — Apr. 10, 2003
  • pp: 1987–1995

Aberration measurement of photolithographic lenses by use of hybrid diffractive photomasks

Jinwon Sung, Mahesh Pitchumani, and Eric G. Johnson  »View Author Affiliations

Applied Optics, Vol. 42, Issue 11, pp. 1987-1995 (2003)

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In optical lithography the degradation of image quality due to aberrations present in the exposure tool is a serious problem. Therefore it is desirable to establish a reliable aberration measurement procedure based on the analysis of printed images in the photoresist. We present what is to our knowledge a new method for characterizing the aberrations of an exposure tool using a hybrid diffractive photomask. By utilizing each different impact on the aberrated image from each diffracted illumination, we were able to extract the aberration present in the stepper system. We experimentally verified this method with a G-line stepper and verified its spherical aberration astigmatism.

© 2003 Optical Society of America

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(110.3000) Imaging systems : Image quality assessment
(110.5220) Imaging systems : Photolithography
(120.3940) Instrumentation, measurement, and metrology : Metrology

Original Manuscript: July 1, 2002
Revised Manuscript: November 8, 2002
Published: April 10, 2003

Jinwon Sung, Mahesh Pitchumani, and Eric G. Johnson, "Aberration measurement of photolithographic lenses by use of hybrid diffractive photomasks," Appl. Opt. 42, 1987-1995 (2003)

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