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Applied Optics

Applied Optics


  • Vol. 42, Iss. 13 — May. 1, 2003
  • pp: 2354–2365

Fourier-transform phase-shifting interferometry

Leslie L. Deck  »View Author Affiliations

Applied Optics, Vol. 42, Issue 13, pp. 2354-2365 (2003)

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Phase-shifting interferometry is a preferred technique for high-precision surface form measurements, but the difficulty in handling the intensity distortions from multiple-surface interference has limited the general use of the technique to interferometer cavities producing strict two-beam interference. I show how the capabilities of phase-shifting interferometry can be extended to address this problem using wavelength tuning techniques. The basic theory behind the technique is reviewed and applied specifically to the measurement of parallel plates, where surfaces, optical and physical thickness, and homogeneity are simultaneously obtained. Basic system requirements are derived, common error sources are discussed, and the results of the measurements are compared with theory and alternative measurement methods.

© 2003 Optical Society of America

OCIS Codes
(070.6020) Fourier optics and signal processing : Continuous optical signal processing
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: August 7, 2002
Revised Manuscript: December 9, 2002
Published: May 1, 2003

Leslie L. Deck, "Fourier-transform phase-shifting interferometry," Appl. Opt. 42, 2354-2365 (2003)

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