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Applied Optics

Applied Optics


  • Vol. 42, Iss. 13 — May. 1, 2003
  • pp: 2388–2397

Micromachined, silicon filament light source for spectrophotometric microsystems

Juliana Tu, Dwight Howard, Scott D. Collins, and Rosemary L. Smith  »View Author Affiliations

Applied Optics, Vol. 42, Issue 13, pp. 2388-2397 (2003)

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A miniature broadband light source is a critical element in a spectrophotometric microsystem. The design, fabrication, and characterization of a highly stable, miniature broadband light source that comprises filaments of single-crystal silicon are presented. Electrical current versus voltage and radiant emittance spectra under constant voltage bias are measured and related to filament dimensions. A maximum stable operating temperature for these filaments is estimated to be 1200 K. Resistance drift is demonstrated to be less than 0.5% over a 10-h period of continuous operation with visible incandescence. Emittance spectra of a multifilament array, measured at three different electrical biases, are presented and shown to compare well with theoretical blackbody radiation spectra. A continuous, total radiated power of 10.7 mW was achieved with a 1 mm × 1 mm filament array with peak emittance at λ = 2.7 µm.

© 2003 Optical Society of America

OCIS Codes
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(230.4000) Optical devices : Microstructure fabrication
(230.6080) Optical devices : Sources

Original Manuscript: October 20, 2002
Revised Manuscript: February 3, 2003
Published: May 1, 2003

Juliana Tu, Dwight Howard, Scott D. Collins, and Rosemary L. Smith, "Micromachined, silicon filament light source for spectrophotometric microsystems," Appl. Opt. 42, 2388-2397 (2003)

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