A miniature broadband light source is a critical element in a spectrophotometric microsystem. The design, fabrication, and characterization of a highly stable, miniature broadband light source that comprises filaments of single-crystal silicon are presented. Electrical current versus voltage and radiant emittance spectra under constant voltage bias are measured and related to filament dimensions. A maximum stable operating temperature for these filaments is estimated to be 1200 K. Resistance drift is demonstrated to be less than 0.5% over a 10-h period of continuous operation with visible incandescence. Emittance spectra of a multifilament array, measured at three different electrical biases, are presented and shown to compare well with theoretical blackbody radiation spectra. A continuous, total radiated power of 10.7 mW was achieved with a 1 mm × 1 mm filament array with peak emittance at λ = 2.7 µm.
© 2003 Optical Society of America
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(230.4000) Optical devices : Microstructure fabrication
(230.6080) Optical devices : Sources
Juliana Tu, Dwight Howard, Scott D. Collins, and Rosemary L. Smith, "Micromachined, Silicon Filament Light Source for Spectrophotometric Microsystems," Appl. Opt. 42, 2388-2397 (2003)