A new method that uses optical microscopy to determine the physical structure of lobster-eye x-ray optics is described. This approach offers the ability to predict x-ray performance without having to take an x-ray measurement. An overlapping series of images of the entrance and exit faces of an optic are obtained and examined by purpose-built software. A 24-parameter description of each channel is obtained from which a quantitative analysis of all the major optic defects, except surface roughness, is performed. Results for a planar lobster-eye optic are used to illustrate this technique and discuss its abilities as well as directions for future enhancements.
© 2003 Optical Society of America
(100.2960) Image processing : Image analysis
(110.7440) Imaging systems : X-ray imaging
(120.3940) Instrumentation, measurement, and metrology : Metrology
(340.7440) X-ray optics : X-ray imaging
Thomas H. K. Irving, Andrew G. Peele, and Keith A. Nugent, "Optical metrology for analysis of lobster-eye x-ray optics," Appl. Opt. 42, 2422-2430 (2003)