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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 13 — May. 1, 2003
  • pp: 2422–2430

Optical metrology for analysis of lobster-eye x-ray optics

Thomas H. K. Irving, Andrew G. Peele, and Keith A. Nugent  »View Author Affiliations


Applied Optics, Vol. 42, Issue 13, pp. 2422-2430 (2003)
http://dx.doi.org/10.1364/AO.42.002422


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Abstract

A new method that uses optical microscopy to determine the physical structure of lobster-eye x-ray optics is described. This approach offers the ability to predict x-ray performance without having to take an x-ray measurement. An overlapping series of images of the entrance and exit faces of an optic are obtained and examined by purpose-built software. A 24-parameter description of each channel is obtained from which a quantitative analysis of all the major optic defects, except surface roughness, is performed. Results for a planar lobster-eye optic are used to illustrate this technique and discuss its abilities as well as directions for future enhancements.

© 2003 Optical Society of America

OCIS Codes
(100.2960) Image processing : Image analysis
(110.7440) Imaging systems : X-ray imaging
(120.3940) Instrumentation, measurement, and metrology : Metrology
(340.7440) X-ray optics : X-ray imaging

History
Original Manuscript: August 2, 2002
Revised Manuscript: January 21, 2003
Published: May 1, 2003

Citation
Thomas H. K. Irving, Andrew G. Peele, and Keith A. Nugent, "Optical metrology for analysis of lobster-eye x-ray optics," Appl. Opt. 42, 2422-2430 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-13-2422

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