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Applied Optics

Applied Optics


  • Vol. 42, Iss. 18 — Jun. 20, 2003
  • pp: 3505–3508

Beam homogenizer for hollow-fiber delivery system of excimer laser light

Yuji Matsuura, Daisuke Akiyama, and Mitsunobu Miyagi  »View Author Affiliations

Applied Optics, Vol. 42, Issue 18, pp. 3505-3508 (2003)

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A beam homogenizer for a hollow-fiber-based, UV laser delivery system is proposed. A rectangular glass waveguide with an inner aluminum coating that has a 1-mm square cross section is attached at the output end of the circular-core hollow fiber with a 1-mm inner diameter. The rectangular waveguide generates a number of higher-order modes and results in a uniform top-hat profile. The configuration of the waveguide is designed by a ray-tracing technique so that both the low transmission loss and the high uniformity in the output beam are obtained. The fabricated waveguide shows a low loss of 0.4 dB, and the intensity variation coefficient is 7%. The output beam from the rectangular waveguide is expanded by a lens to the size larger than 10-mm square. It is also shown that the profile does not change with the bending condition.

© 2003 Optical Society of America

OCIS Codes
(060.2340) Fiber optics and optical communications : Fiber optics components
(140.2180) Lasers and laser optics : Excimer lasers
(230.7370) Optical devices : Waveguides

Original Manuscript: November 5, 2002
Revised Manuscript: March 27, 2003
Published: June 20, 2003

Yuji Matsuura, Daisuke Akiyama, and Mitsunobu Miyagi, "Beam homogenizer for hollow-fiber delivery system of excimer laser light," Appl. Opt. 42, 3505-3508 (2003)

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  1. Y. Matsuura, M. Miyagi, “Aluminum-coated hollow glass fibers for ArF-excimer laser light fabricated by metallorganic chemical-vapor deposition,” Appl. Opt. 38, 2458–2462 (1999). [CrossRef]
  2. Y. Matsuura, T. Yamamoto, M. Miyagi, “Delivery of F2-excimer laser light by aluminum hollow fibers,” Opt. Express 6, 257–261 (2000), http://www.opticsexpress.org . [CrossRef] [PubMed]
  3. F. M. Dickey, S. C. Holswade, Laser Beam Shaping (Marcel Dekker, New York, 2000). [CrossRef]
  4. C. L. S. Lewis, I. Weaver, L. A. Doyle, G. W. Martin, T. Morrow, D. A. Pepler, C. N. Danson, I. N. Ross, “Use of a random phase plate as a KrF laser beam homogenizer for thin film deposition applications,” Rev. Sci. Instrum. 70, 2116–2121 (1999). [CrossRef]
  5. J. A. Hoffnagle, C. M. Jefferson, “Design and performance of a refractive optical system that converts a Gaussian to a flattop beam,” Appl. Opt. 39, 5488–5499 (2000). [CrossRef]
  6. K. Jain, M. Zemel, M. Klosner, “Large-area high-resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication,” Proc. IEEE 90, 1681–1688 (2002). [CrossRef]
  7. Y. Matsuura, M. Miyagi, A. German, L. Nagli, A. Katzir, “Silver-halide fiber tip as a beam homogenizer for infrared hollow waveguides,” Opt. Lett. 22, 1308–1310 (1997). [CrossRef]
  8. M. M. Chen, J. B. Berkowitz-Mattuck, P. E. Glaser, “The use of kaleidoscope to obtain uniform flux over a large area in a solar or arc imaging furnace,” Appl. Opt. 2, 265–271 (1963). [CrossRef]
  9. R. E. Grojean, D. Feldman, J. F. Roach, “Production of flat top beam profiles for high energy lasers,” Rev. Sci. Instum. 51, 375–376 (1980). [CrossRef]
  10. J. M. Geary, “Channel integration for laser beam uniformity on target,” Opt. Eng. 27, 972–977 (1988). [CrossRef]
  11. R. J. Koshel, I. A. Walmsley, “Modeling of the gain distribution for diode pumping of a solid-state laser rod with nonimaging optics,” Appl. Opt. 32, 1517–1527 (1993). [CrossRef] [PubMed]
  12. J. S. Bendat, A. G. Piersol, Random Data, Analysis and Measurement Procedures, 2nd ed. (Wiley, New York, 1986).

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