The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p → s and s → p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique.
© 2003 Optical Society of America
(050.1950) Diffraction and gratings : Diffraction gratings
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
Original Manuscript: January 17, 2003
Published: July 1, 2003
Ricardo A. Depine and Marina E. Inchaussandague, "Polarization conversion from highly conducting, asymmetric trapezoidal gratings," Appl. Opt. 42, 3742-3744 (2003)