OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 19 — Jul. 1, 2003
  • pp: 3742–3744

Polarization conversion from highly conducting, asymmetric trapezoidal gratings

Ricardo A. Depine and Marina E. Inchaussandague  »View Author Affiliations


Applied Optics, Vol. 42, Issue 19, pp. 3742-3744 (2003)
http://dx.doi.org/10.1364/AO.42.003742


View Full Text Article

Enhanced HTML    Acrobat PDF (96 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The differences in the curves of the zeroth-order cross-polarization reflection coefficients (ps and sp) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between ps and sp conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique.

© 2003 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements

History
Original Manuscript: January 17, 2003
Published: July 1, 2003

Citation
Ricardo A. Depine and Marina E. Inchaussandague, "Polarization conversion from highly conducting, asymmetric trapezoidal gratings," Appl. Opt. 42, 3742-3744 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-19-3742

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited