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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 19 — Jul. 1, 2003
  • pp: 3827–3831

Height measurement of microchip connecting pins by use of stereovision

Cho Jui Tay, Xin Kang, Chenggen Quan, Xiao Yuan He, and Huai Min Shang  »View Author Affiliations


Applied Optics, Vol. 42, Issue 19, pp. 3827-3831 (2003)
http://dx.doi.org/10.1364/AO.42.003827


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Abstract

A stereovision method for estimating the height of connecting pins on a microchip is described. The technique uses a centroidal method to simplify the calculation. A few seconds are required for a Pentium 586 PC to calculate the heights of 300 connecting pins on a 50 mm × 50 mm microchip. The method is described, and experimental results are presented. The optical system, which consists of two CCD cameras with long-focal-length lenses and a two-channel digital image grabber, is capable of in situ measurement.

© 2003 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(150.6910) Machine vision : Three-dimensional sensing

History
Original Manuscript: August 6, 2002
Revised Manuscript: February 28, 2003
Published: July 1, 2003

Citation
Cho Jui Tay, Xin Kang, Chenggen Quan, Xiao Yuan He, and Huai Min Shang, "Height measurement of microchip connecting pins by use of stereovision," Appl. Opt. 42, 3827-3831 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-19-3827

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