A stereovision method for estimating the height of connecting pins on a microchip is described. The technique uses a centroidal method to simplify the calculation. A few seconds are required for a Pentium 586 PC to calculate the heights of 300 connecting pins on a 50 mm × 50 mm microchip. The method is described, and experimental results are presented. The optical system, which consists of two CCD cameras with long-focal-length lenses and a two-channel digital image grabber, is capable of <i>in situ</i> measurement.
© 2003 Optical Society of America
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(150.6910) Machine vision : Three-dimensional sensing
Cho Jui Tay, Xin Kang, Chenggen Quan, Xiao Yuan He, and Huai Min Shang, "Height Measurement of Microchip Connecting Pins by Use of Stereovision," Appl. Opt. 42, 3827-3831 (2003)