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Applied Optics

Applied Optics


  • Vol. 42, Iss. 19 — Jul. 1, 2003
  • pp: 3827–3831

Height measurement of microchip connecting pins by use of stereovision

Cho Jui Tay, Xin Kang, Chenggen Quan, Xiao Yuan He, and Huai Min Shang  »View Author Affiliations

Applied Optics, Vol. 42, Issue 19, pp. 3827-3831 (2003)

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A stereovision method for estimating the height of connecting pins on a microchip is described. The technique uses a centroidal method to simplify the calculation. A few seconds are required for a Pentium 586 PC to calculate the heights of 300 connecting pins on a 50 mm × 50 mm microchip. The method is described, and experimental results are presented. The optical system, which consists of two CCD cameras with long-focal-length lenses and a two-channel digital image grabber, is capable of in situ measurement.

© 2003 Optical Society of America

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(150.6910) Machine vision : Three-dimensional sensing

Original Manuscript: August 6, 2002
Revised Manuscript: February 28, 2003
Published: July 1, 2003

Cho Jui Tay, Xin Kang, Chenggen Quan, Xiao Yuan He, and Huai Min Shang, "Height measurement of microchip connecting pins by use of stereovision," Appl. Opt. 42, 3827-3831 (2003)

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  1. C. J. Tay, X. Y. He, X. Kang, C. Quan, H. M. Shang, “Coplanarity study on ball grid array packaging,” Opt. Eng. 40, 1608–1612 (2001). [CrossRef]
  2. P. F. Luo, Y. J. Chao, M. A. Sutton, W. H. Peters, “Accurate measurement of three-dimensional displacement in deformable bodies using computer vision,” Exp. Mech. 33, 123–132 (1993). [CrossRef]
  3. P. F. Luo, Y. J. Chao, M. A. Sutton, “Application of stereo vision to three-dimensional deformation analyses in fracture experiments,” Opt. Eng. 33, 981–990 (1994). [CrossRef]
  4. Y. Morimoto, M. Fujigaki, “Automated analysis of 3-D shape and surface strain distributions of a moving object using stereo vision,” Opt. Lasers Eng. 18, 195–212 (1993). [CrossRef]
  5. J. J. Aguilar, F. Torres, M. A. Lope, “Stereo vision for 3D measurement: accuracy analysis, calibration and industrial applications,” Measurement 18, 193–200 (1996). [CrossRef]
  6. P. F. Luo, S. S. Liou, “Measurement of curved surface by stereo vision and error analysis,” Opt. Lasers Eng. 30, 471–486 (1999). [CrossRef]
  7. C. Quan, X. Y. He, C. F. Wang, C. J. Tay, H. M. Shang, “Shape measurement of small objects using LCD fringe projection with phase shifting,” Opt. Commun. 189, 21–29 (2001). [CrossRef]
  8. C. Quan, C. J. Tay, H. M. Shang, “Fringe projection technique for the 3-D shape measurement of a hydro-formed shell,” J. Mater. Process. Technol. 19, 88–91 (1999). [CrossRef]
  9. P. K. Rastogi, L. Pflug, “A holographic technique featuring broad range sensitivity to contour diffuse objects,” J. Mod. Opt. 38, 1673–1683 (1991). [CrossRef]
  10. C. Joenathan, B. Franze, P. Haible, H. J. Tiziani, “Contouring by electronic speckle pattern interferometry using dual beam illumination,” Appl. Opt. 29, 1905–1911 (1990). [CrossRef] [PubMed]
  11. C. J. Tay, H. M. Shang, A. N. Poo, M. Lou, “On the determination of slope by shearography,” Opt. Lasers Eng. 20, 207–217 (1994).
  12. S. Wei, S. Wu, I. Kao, F. P. Chiang, “Measurement of wafer surface using shadow moiré with Talbot effect,” J. Electron. Packaging 120, 166–170 (1998). [CrossRef]
  13. X. Y. He, D. Zou, S. Liu, Y. Guo, “Phase-shifting analysis in moiré interferometry and its application in electronic packaging,” Opt. Eng. 37, 1410–1419 (1998). [CrossRef]
  14. B. Chen, L. Shi, X. Y. He, J. B. Dai, S. Liu, “Projected grating moiré,” Printed Circuit Fabrication 22, 36, 38–39 (1999), in Chinese.
  15. B. F. Alexander, K. C. Ng, “Elimination of systematic error in sub-pixel accuracy centroid estimation,” Opt. Eng. 30, 1320–1331 (1991). [CrossRef]
  16. J. S. Sirkis, “System response to automated grid method,” Opt. Eng. 29, 1485–1493 (1990). [CrossRef]
  17. P. M. Salomon, T. A. Glavich, “Image signal processing in sub-pixel accuracy star trackers,” in Smart Sensors II, D. F. Barbe, ed., Proc. SPIE252, 64–74 (1980). [CrossRef]

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