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Applied Optics

Applied Optics


  • Vol. 42, Iss. 19 — Jul. 1, 2003
  • pp: 4049–4058

High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition

Eberhard Spiller, Sherry L. Baker, Paul B. Mirkarimi, Victor Sperry, Eric M. Gullikson, and Daniel G. Stearns  »View Author Affiliations

Applied Optics, Vol. 42, Issue 19, pp. 4049-4058 (2003)

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An ion-beam deposition system has been used to fabricate Mo-Si multilayer coatings for masks and imaging optics to be used for extreme-ultraviolet lithography. In addition to high reflectivity and excellent profile control, ion-beam deposition has the capability to smooth rough substrates. For example, we achieved reflectivity of 66.8% on a substrate with 0.39-nm roughness. Smoothing can be further enhanced with a second ion source directed at the multilayer coating. The smoothing capabilities relax the requirement on the finish of the mirror and the mask substrates and could dramatically reduce the cost of these components. Thickness profile control is in the ±0.01% range, and the figure error added to the mirror substrate by errors in the multilayer thickness is less than 0.1 nm. Peak reflectivities obtained on smooth substrates are 67.5–68.6%.

© 2003 Optical Society of America

OCIS Codes
(110.3960) Imaging systems : Microlithography
(310.0310) Thin films : Thin films
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors

Original Manuscript: January 30, 2003
Revised Manuscript: April 2, 2003
Published: July 1, 2003

Eberhard Spiller, Sherry L. Baker, Paul B. Mirkarimi, Victor Sperry, Eric M. Gullikson, and Daniel G. Stearns, "High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition," Appl. Opt. 42, 4049-4058 (2003)

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