We deposited graded-index SiO2 films using glancing angle deposition to produce high-transmission antireflection coatings on glass. Because of the accurate control over the thin-film microstructure provided by this technique, we were able to create graded densities with a Gaussian profile resulting in transmission values greater than 99.9% for a single-layer interface with bandwidths up to 460 nm. The graded-index layer also provides low reflectance at nonnormal angles of incidence with transmission values degrading little for incidence angles up to 30°.
© 2003 Optical Society of America
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.0310) Optics at surfaces : Thin films
(310.1210) Thin films : Antireflection coatings
(310.1860) Thin films : Deposition and fabrication
Scott R. Kennedy and Michael J. Brett, "Porous Broadband Antireflection Coating by Glancing Angle Deposition," Appl. Opt. 42, 4573-4579 (2003)