A surplus amount of oxygen is needed to produce titanium dioxide films by reactive electron-beam evaporation of Ti<sub>3</sub>O<sub>5</sub>. We investigated the ratio of the rates at which oxygen molecules and TiO<sub><i>x</i></sub> molecules impinge upon substrates at 25° and 250 °C to produce TiO<sub>2</sub> films that show no optical absorption in the visible spectral region. On unheated substrates the ratio was 49, and at 250 °C it was 26, provided that the substrates had been exposed to air after being coated at the given substrate temperature. Higher ratios were required if the TiO<sub>2</sub> film was covered with a SiO<sub>2</sub> film, which impeded further oxidation. Furthermore, the postdeposition oxidation behavior of these films was studied.
© 2003 Optical Society of America
Robert Linsbod, Elmar Ritter, and Klaus Leitner, "Evaluation of the Oxidation of TiO2 Films during Reactive Evaporation of Ti3O5 and during Exposure of the Films to the Atmosphere," Appl. Opt. 42, 4580-4583 (2003)