The titanium suboxides TiO, Ti2O3, and Ti3O5 are widely used to produce films of titanium dioxide by reactive evaporation. If they are evaporated in high vacuum, however, they yield absorbing TiO x films with a transmission color varying between blue and gray. We investigated the specific properties of these TiO x films. TiO, Ti2O3, Ti3O5, and titanium metal were evaporated in high vacuum upon glass substrates at 25° and 250 °C. Differences in chemical composition, transmission and reflection, color, stress, and abrasion resistance of these films, depending on the starting material and the substrate temperature, were evaluated.
© 2003 Optical Society of America
Original Manuscript: January 3, 2003
Revised Manuscript: April 11, 2003
Published: August 1, 2003
Friedrich Waibel, Elmar Ritter, and Robert Linsbod, "Properties of TiOx films prepared by electron- beam evaporation of titanium and titanium suboxides," Appl. Opt. 42, 4590-4593 (2003)