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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 22 — Aug. 1, 2003
  • pp: 4590–4593

Properties of TiO x films prepared by electron- beam evaporation of titanium and titanium suboxides

Friedrich Waibel, Elmar Ritter, and Robert Linsbod  »View Author Affiliations


Applied Optics, Vol. 42, Issue 22, pp. 4590-4593 (2003)
http://dx.doi.org/10.1364/AO.42.004590


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Abstract

The titanium suboxides TiO, Ti2O3, and Ti3O5 are widely used to produce films of titanium dioxide by reactive evaporation. If they are evaporated in high vacuum, however, they yield absorbing TiO x films with a transmission color varying between blue and gray. We investigated the specific properties of these TiO x films. TiO, Ti2O3, Ti3O5, and titanium metal were evaporated in high vacuum upon glass substrates at 25° and 250 °C. Differences in chemical composition, transmission and reflection, color, stress, and abrasion resistance of these films, depending on the starting material and the substrate temperature, were evaluated.

© 2003 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: January 3, 2003
Revised Manuscript: April 11, 2003
Published: August 1, 2003

Citation
Friedrich Waibel, Elmar Ritter, and Robert Linsbod, "Properties of TiOx films prepared by electron- beam evaporation of titanium and titanium suboxides," Appl. Opt. 42, 4590-4593 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-22-4590

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