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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 28 — Oct. 1, 2003
  • pp: 5661–5669

Measurement by Multidirectional Interferometers of the Position and Orientation of a Positioning Stage

Jie Zhang, Tetsuya Yamaguchi, Koichi Iwata, Hisao Kikuta, and Choong Sik Park  »View Author Affiliations


Applied Optics, Vol. 42, Issue 28, pp. 5661-5669 (2003)
http://dx.doi.org/10.1364/AO.42.005661


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Abstract

A multidirectional interferometer system is developed to determine the position and orientation of a stage moved in a two-dimensional (2-D) space. In this system four corner-cube prisms are mounted on the moving stage, and four laser beams are incident on the corner cubes in different directions. Moving distances in the observed directions are measured by laser interferometers. The position and orientation of the stage are calculated from the moving distances of the corner cubes. Some experiments are done on the 2-D moving stage with four interferometers, and measurement errors are estimated from redundant data. The estimated accuracy is higher than 0.2 μm for translation and 0.3 × 10−3 deg for rotation for a measurement range of 0.5 mm and 0.5 deg.

© 2003 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

Citation
Jie Zhang, Tetsuya Yamaguchi, Koichi Iwata, Hisao Kikuta, and Choong Sik Park, "Measurement by Multidirectional Interferometers of the Position and Orientation of a Positioning Stage," Appl. Opt. 42, 5661-5669 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-28-5661


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References

  1. E. H. Bokelberg, H. J. Sommer III, and M. W. Trethewey, “A six-degree-of-freedom laser vibrometer,” J. Sound Vib. 178, 643–667 (1994).
  2. I. J. Busch-Vishniac, A. B. Buckman, W. Wang, D. Qian, and V. Mancevski, “Noncontact position measurement systems using optical sensor,” U.S. patent 5,367,373 (22 November 1994).
  3. N. K. S. Lee, Y. Cai, and A. Joneja, “High-resolution multidimensional displacement monitoring system,” Opt. Eng. 36, 2287–2293 (1997).
  4. J. A. Kim, K. C. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Six-degree-of-freedom displacement measurement system using a diffraction grating,” Rev. Sci. Instrum. 71, 3214–3219 (2000).
  5. J. A. Kim, E. W. Bae, S. H. Kim, and Y. K. Kwak, “Application of sensitivity analysis for the design of six-degree-of-freedom measurement,” Opt. Eng. 40, 2837–2844 (2001).
  6. W. S. Park and H. S. Cho, “Measurement of fine 6-degree-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation,” Opt. Eng. 41, 860–871 (2002).
  7. K. C. Fan and M. J. Chen, “A 6-degree-of-freedom measurement system for the accuracy of X-Y stages,” Precis. Eng. 24, 15–23 (2000).
  8. O. Nakamura and M. Goto, “Laser interferometric calibration of microscan mechanisms by using three laser beams,” Precis. Eng. 15, 39–43 (1993).
  9. O. Nakamura, M. Goto, K. Toyoda, N. Takai, T. Kurosawa, and T. Nakamuta, “A laser tracking robot-performance calibration system using ball-seated bearing mechanisms and a spherically shaped cat’s-eye retroreflector,” Rev. Sci. Instrum. 65, 1006–1011 (1994).
  10. T. Takatsuji, M. Goto, T. Kurosawa, T. Tanimura, and Y. Koseki, “The first measurement of a three-dimensional coordinate by use of a laser tracking interferometer system based on trilateration,” Meas. Sci. Technol. 9, 38–41 (1998).
  11. J. Zhang, K. Iwata, H. Kikuta, and C. S. Park, “An interferometric system for measuring position and orientation of a positioning stage,” in Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, Y. V. Chugui, S. N. Bagayev, A. Weckenmann, and P. Herbert Osanna, eds., Proc. SPIE 4900, 304–311 (2002).

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