OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 28 — Oct. 1, 2003
  • pp: 5670–5678

Increasing the Range of Unambiguity in Step-Height Measurement with Multiple-Wavelength Interferometry-Application to Absolute Long Gauge Block Measurement

Jennifer E. Decker, John R. Miles, Alan A. Madej, Ralph F. Siemsen, Klaus J. Siemsen, Sebastian de Bonth, Krijn Bustraan, Sara Temple, and James R. Pekelsky  »View Author Affiliations


Applied Optics, Vol. 42, Issue 28, pp. 5670-5678 (2003)
http://dx.doi.org/10.1364/AO.42.005670


View Full Text Article

Acrobat PDF (318 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to ±140 μm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada.

© 2003 Optical Society of America

OCIS Codes
(000.2170) General : Equipment and techniques
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement

Citation
Jennifer E. Decker, John R. Miles, Alan A. Madej, Ralph F. Siemsen, Klaus J. Siemsen, Sebastian de Bonth, Krijn Bustraan, Sara Temple, and James R. Pekelsky, "Increasing the Range of Unambiguity in Step-Height Measurement with Multiple-Wavelength Interferometry-Application to Absolute Long Gauge Block Measurement," Appl. Opt. 42, 5670-5678 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-28-5670

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited