Laser-induced breakdown spectroscopy (LIBS) has been applied mainly to bulk analysis of solids, liquids, and gases and less frequently for elemental microanalysis of solid surfaces. A micro-LIBS device devoted to analysis of the distribution of elements on surfaces is described. This device offers rapid access with a 3-µm spatial resolution to the microchemical structures of both conductive and nonconductive samples. Quantitative microchemical results of applications to ceramics are reported. By the use of a time-resolved acquisition spectrum, cerium in a uranium matrix was characterized with a cerium detection limit of 1.14%. Calibration curves obtained with manipulations during 1 year facilitated evaluations of reproducibility and repeatability. A 2% single-shot repeatability with a calibration reproducibility of ∼7% is reported.
© 2003 Optical Society of America
Original Manuscript: January 20, 2003
Revised Manuscript: May 28, 2003
Published: October 20, 2003
Denis Menut, Pascal Fichet, Jean-Luc Lacour, Annie Rivoallan, and Patrick Mauchien, "Micro-laser-induced breakdown spectroscopy technique: a powerful method for performing quantitative surface mapping on conductive and nonconductive samples," Appl. Opt. 42, 6063-6071 (2003)