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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 30 — Oct. 20, 2003
  • pp: 6063–6071

Micro-laser-induced breakdown spectroscopy technique: a powerful method for performing quantitative surface mapping on conductive and nonconductive samples

Denis Menut, Pascal Fichet, Jean-Luc Lacour, Annie Rivoallan, and Patrick Mauchien  »View Author Affiliations


Applied Optics, Vol. 42, Issue 30, pp. 6063-6071 (2003)
http://dx.doi.org/10.1364/AO.42.006063


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Abstract

Laser-induced breakdown spectroscopy (LIBS) has been applied mainly to bulk analysis of solids, liquids, and gases and less frequently for elemental microanalysis of solid surfaces. A micro-LIBS device devoted to analysis of the distribution of elements on surfaces is described. This device offers rapid access with a 3-µm spatial resolution to the microchemical structures of both conductive and nonconductive samples. Quantitative microchemical results of applications to ceramics are reported. By the use of a time-resolved acquisition spectrum, cerium in a uranium matrix was characterized with a cerium detection limit of 1.14%. Calibration curves obtained with manipulations during 1 year facilitated evaluations of reproducibility and repeatability. A 2% single-shot repeatability with a calibration reproducibility of ∼7% is reported.

© 2003 Optical Society of America

OCIS Codes
(140.3440) Lasers and laser optics : Laser-induced breakdown
(300.6210) Spectroscopy : Spectroscopy, atomic

History
Original Manuscript: January 20, 2003
Revised Manuscript: May 28, 2003
Published: October 20, 2003

Citation
Denis Menut, Pascal Fichet, Jean-Luc Lacour, Annie Rivoallan, and Patrick Mauchien, "Micro-laser-induced breakdown spectroscopy technique: a powerful method for performing quantitative surface mapping on conductive and nonconductive samples," Appl. Opt. 42, 6063-6071 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-30-6063

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