Laser-induced breakdown spectroscopy (LIBS) has been applied mainly to bulk analysis of solids, liquids, and gases and less frequently for elemental microanalysis of solid surfaces. A micro-LIBS device devoted to analysis of the distribution of elements on surfaces is described. This device offers rapid access with a 3-μm spatial resolution to the microchemical structures of both conductive and nonconductive samples. Quantitative microchemical results of applications to ceramics are reported. By the use of a time-resolved acquisition spectrum, cerium in a uranium matrix was characterized with a cerium detection limit of 1.14%. Calibration curves obtained with manipulations during 1 year facilitated evaluations of reproducibility and repeatability. A 2% single-shot repeatability with a calibration reproducibility of ~7% is reported.
© 2003 Optical Society of America
Denis Menut, Pascal Fichet, Jean-Luc Lacour, Annie Rivoallan, and Patrick Mauchien, "Micro-Laser-Induced Breakdown Spectroscopy Technique: A Powerful Method for Performing Quantitative Surface Mapping on Conductive and Nonconductive Samples," Appl. Opt. 42, 6063-6071 (2003)