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Applied Optics

Applied Optics


  • Vol. 42, Iss. 31 — Nov. 1, 2003
  • pp: 6374–6381

Measurement of extreme-ultraviolet attenuation edges of magnesium, tin, and indium filters

John Seely and Benjawan Kjornrattanawanich  »View Author Affiliations

Applied Optics, Vol. 42, Issue 31, pp. 6374-6381 (2003)

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We determined the energies of the Mg L2,3, Sn N4,5, and In N4,5 attenuation edges by measuring the transmission of high-resolution synchrotron radiation through thin filters. The Al L2,3 and Si L3 edges observed in the first and higher diffraction orders from the monochromator were used as energy fiducials. For each attenuation edge, the onset of attenuation with increasing energy and the inflection point of the attenuation curve were measured. The measured energy values were compared with previously determined attenuation edge energies and with electron binding energies. The measured energies of the inflection points are Mg L2 (49.89 ± 0.02 eV), Mg L3 (49.58 ± 0.02 eV), Sn N4 (25.00 ± 0.02 eV), Sn N5 (23.97 ± 0.02 eV), In N4 (17.66 ± 0.02 eV), and In N5 (16.70 ± 0.02 eV).

© 2003 Optical Society of America

OCIS Codes
(310.6860) Thin films : Thin films, optical properties
(350.2450) Other areas of optics : Filters, absorption

Original Manuscript: April 25, 2003
Revised Manuscript: July 16, 2003
Published: November 1, 2003

John Seely and Benjawan Kjornrattanawanich, "Measurement of extreme-ultraviolet attenuation edges of magnesium, tin, and indium filters," Appl. Opt. 42, 6374-6381 (2003)

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