Abstract

A method for measuring profiles along a circle on a flat surface with no standard is described. For the measurement, two unknown surfaces are placed almost parallel, and the distance between them is measured many times along a circle by rotation of one of the surfaces. Profiles of the two surfaces can be determined from the distance data. In this study the measuring method is explained: The space between two surfaces measured with a Fizeau interferometer. Four measuring experiments are carried out for determining the profile of a precision-grade half-mirror; in each experiment a different ordinary mirror with unknown profile is used as the second mirror. Profiles of the precise mirrors obtained by these experiments agree closely, with deviations of ∼2 nm. A similar experiment with many concentric circles was carried out with a precise half-mirror and another precise mirror. Although the profiles of many concentric circles were independent of one another, the result shows that the high-frequency component of a whole plane can be estimated.

© 2003 Optical Society of America

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