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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 34 — Dec. 1, 2003
  • pp: 6853–6858

Measurement of profiles along a circle on two flat surfaces by use of a Fizeau interferometer with no standard

Shohachi Sonozaki, Koichi Iwata, and Yoshihisa Iwahashi  »View Author Affiliations


Applied Optics, Vol. 42, Issue 34, pp. 6853-6858 (2003)
http://dx.doi.org/10.1364/AO.42.006853


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Abstract

A method for measuring profiles along a circle on a flat surface with no standard is described. For the measurement, two unknown surfaces are placed almost parallel, and the distance between them is measured many times along a circle by rotation of one of the surfaces. Profiles of the two surfaces can be determined from the distance data. In this study the measuring method is explained: The space between two surfaces measured with a Fizeau interferometer. Four measuring experiments are carried out for determining the profile of a precision-grade half-mirror; in each experiment a different ordinary mirror with unknown profile is used as the second mirror. Profiles of the precise mirrors obtained by these experiments agree closely, with deviations of ∼2 nm. A similar experiment with many concentric circles was carried out with a precise half-mirror and another precise mirror. Although the profiles of many concentric circles were independent of one another, the result shows that the high-frequency component of a whole plane can be estimated.

© 2003 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

History
Original Manuscript: February 17, 2003
Revised Manuscript: August 28, 2003
Published: December 1, 2003

Citation
Shohachi Sonozaki, Koichi Iwata, and Yoshihisa Iwahashi, "Measurement of profiles along a circle on two flat surfaces by use of a Fizeau interferometer with no standard," Appl. Opt. 42, 6853-6858 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-34-6853

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