Measurement of Profiles along a Circle on Two Flat Surfaces by Use of a Fizeau Interferometer with No Standard
Applied Optics, Vol. 42, Issue 34, pp. 6853-6858 (2003)
http://dx.doi.org/10.1364/AO.42.006853
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Abstract
A method for measuring profiles along a circle on a flat surface with no standard is described. For the measurement, two unknown surfaces are placed almost parallel, and the distance between them is measured many times along a circle by rotation of one of the surfaces. Profiles of the two surfaces can be determined from the distance data. In this study the measuring method is explained: The space between two surfaces measured with a Fizeau interferometer. Four measuring experiments are carried out for determining the profile of a precision-grade half-mirror; in each experiment a different ordinary mirror with unknown profile is used as the second mirror. Profiles of the precise mirrors obtained by these experiments agree closely, with deviations of ~2 nm. A similar experiment with many concentric circles was carried out with a precise half-mirror and another precise mirror. Although the profiles of many concentric circles were independent of one another, the result shows that the high-frequency component of a whole plane can be estimated.
© 2003 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Citation
Shohachi Sonozaki, Koichi Iwata, and Yoshihisa Iwahashi, "Measurement of Profiles along a Circle on Two Flat Surfaces by Use of a Fizeau Interferometer with No Standard," Appl. Opt. 42, 6853-6858 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-34-6853
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