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Applied Optics

Applied Optics


  • Vol. 42, Iss. 34 — Dec. 1, 2003
  • pp: 6859–6868

High-resolution two-dimensional angle measurement technique based on fringe analysis

Zongtao Ge and Mitsuo Takeda  »View Author Affiliations

Applied Optics, Vol. 42, Issue 34, pp. 6859-6868 (2003)

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A novel angle-measurement technique based on fringe analysis for phase-measuring profilometry is proposed. A two-dimensional (2-D) angle between two mirror surfaces is determined by least-squares fitting of a plane to the 2-D distribution of the phase difference introduced by the 2-D tilt angle. To evaluate the performance of the proposed technique, numerical simulations that use the Fourier-transform technique and the phase-shift technique for fringe analysis were performed, and the results are compared. A 2-D angle-measurement interferometer based on a Mirau interference microscope was developed that demonstrated the validity of the proposed principle. It is shown by simulation and experiment that the proposed 2-D angle-measurement technique can achieve both a wide measurement range and a high angular resolution simultaneously.

© 2003 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology

Original Manuscript: November 25, 2002
Revised Manuscript: August 22, 2003
Published: December 1, 2003

Zongtao Ge and Mitsuo Takeda, "High-resolution two-dimensional angle measurement technique based on fringe analysis," Appl. Opt. 42, 6859-6868 (2003)

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