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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 34 — Dec. 1, 2003
  • pp: 6869–6876

Measurement of air turbulence for on-machine interferometry

Makoto Yamauchi and Kenichi Hibino  »View Author Affiliations


Applied Optics, Vol. 42, Issue 34, pp. 6869-6876 (2003)
http://dx.doi.org/10.1364/AO.42.006869


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Abstract

There is increasing demand for in situ shape measurements performed on ultraprecision processing machines. One major source of error during interferometric measurements performed on machines is fringe displacement due to external disturbances. We have developed an interferometer equipped with an electro-optic phase modulator that measures the phase of interference fringes before they are displaced by air turbulence. The frequency characteristics of air turbulence induced by a heat source are derived from successive measurements of a test surface. Experimental results show that the phase of the interference fringes can be accurately measured in the presence of air turbulence when the intensity of the fringes is sampled at a speed of several hundred hertz.

© 2003 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(230.2090) Optical devices : Electro-optical devices

History
Original Manuscript: May 12, 2003
Revised Manuscript: August 14, 2003
Published: December 1, 2003

Citation
Makoto Yamauchi and Kenichi Hibino, "Measurement of air turbulence for on-machine interferometry," Appl. Opt. 42, 6869-6876 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-34-6869


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References

  1. A. Marquez, M. Yamauchi, J. A. Davis, D. J. Franich, “Phase measurement of a twisted nematic liquid crystal spatial light modulator with a common-path interferometer,” Opt. Commun. 190, 129–133 (2001). [CrossRef]
  2. T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, T. C. Strand, “Laser diode feedback interferometer for stabilization and displacement measurements,” Appl. Opt. 26, 892–897 (1987). [CrossRef] [PubMed]
  3. O. Sasaki, K. Takahashi, T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990). [CrossRef]
  4. I. Yamaguchi, J. Liu, J. Kato, “Active phase-shifting interferometers for shape and deformation measurements,” Opt. Eng. 35, 2930–2937 (1996). [CrossRef]
  5. M. Takeda, H. Ina, S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72, 156–160 (1981). [CrossRef]
  6. M. Melozzi, L. Pezzati, A. Mazzoni, “Vibration-insensitive interferometer for on-line measurements,” Appl. Opt. 34, 5595–5601 (1995). [CrossRef] [PubMed]
  7. F. Roddier, “The effects of atmospheric turbulence in optical astronomy,” in Progress in Optics XIX, E. Wolf, ed. (North-Holland, Amsterdam, 1981), pp. 281–376. [CrossRef]
  8. M. Yamauchi, A. Marquez, J. A. Davis, D. J. Franich, “Interferometric phase measurements for polarization eigenvectors in twisted nematic liquid crystal spatial light modulators,” Opt. Commun. 181, 1–6 (2000). [CrossRef]
  9. K. Creath, “Phase-measurement interferometry techniques,” in Progress in Optics XXVI, E. Wolf, ed. (North-Holland, Amsterdam, 1988), pp. 349–393. [CrossRef]
  10. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, D. J. Brangaccio, “Digital wavefront measuring interferometer for testing optical surfaces and lenses,” Appl. Opt. 13, 2693–2703 (1974). [CrossRef] [PubMed]
  11. K. Hibino, “Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry,” Appl. Opt. 36, 2084–2093 (1997). [CrossRef] [PubMed]

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