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Applied Optics

Applied Optics


  • Vol. 42, Iss. 34 — Dec. 1, 2003
  • pp: 6869–6876

Measurement of air turbulence for on-machine interferometry

Makoto Yamauchi and Kenichi Hibino  »View Author Affiliations

Applied Optics, Vol. 42, Issue 34, pp. 6869-6876 (2003)

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There is increasing demand for in situ shape measurements performed on ultraprecision processing machines. One major source of error during interferometric measurements performed on machines is fringe displacement due to external disturbances. We have developed an interferometer equipped with an electro-optic phase modulator that measures the phase of interference fringes before they are displaced by air turbulence. The frequency characteristics of air turbulence induced by a heat source are derived from successive measurements of a test surface. Experimental results show that the phase of the interference fringes can be accurately measured in the presence of air turbulence when the intensity of the fringes is sampled at a speed of several hundred hertz.

© 2003 Optical Society of America

OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(230.2090) Optical devices : Electro-optical devices

Original Manuscript: May 12, 2003
Revised Manuscript: August 14, 2003
Published: December 1, 2003

Makoto Yamauchi and Kenichi Hibino, "Measurement of air turbulence for on-machine interferometry," Appl. Opt. 42, 6869-6876 (2003)

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