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Applied Optics

Applied Optics


  • Vol. 42, Iss. 34 — Dec. 1, 2003
  • pp: 6945–6952

Production and performance of multilayer-coated conical x-ray mirrors

Melville P. Ulmer, Robert Altkorn, Michael E. Graham, Anita Madan, and Yong S. Chu  »View Author Affiliations

Applied Optics, Vol. 42, Issue 34, pp. 6945-6952 (2003)

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A method of fabricating replica figured x-ray optics with integral multilayer coatings is presented. With the intact electroforming multilayer process (IEMP) technique, we sputter multilayers onto a reusable superpolished mandrel, electroform nickel over the multilayers, and remove the multilayer-coated nickel shell intact from the mandrel. This approach offers advantages over more traditional, original, and segmented-replica fabrication techniques, including low cost; compatibility with a wide range of mirror designs, diameters, and focal lengths; simple integration with multilayer sputtering processes; and the ability to produce complete shells of revolution. The fabrication of W/Si multilayer-coated 10-cm-diameter conical x-ray mirrors is described, as are reflectivity measurements at 10 and 30 keV. The measured reflectivity of the IEMP multilayers at the 10-keV primary Bragg peak was 17%. Measurements of multiple points on the cone showed multilayer uniformity to within a few percent around the mirror.

© 2003 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(340.6720) X-ray optics : Synchrotron radiation
(340.7470) X-ray optics : X-ray mirrors
(350.1260) Other areas of optics : Astronomical optics

Original Manuscript: July 18, 2002
Revised Manuscript: July 14, 2003
Published: December 1, 2003

Melville P. Ulmer, Robert Altkorn, Michael E. Graham, Anita Madan, and Yong S. Chu, "Production and performance of multilayer-coated conical x-ray mirrors," Appl. Opt. 42, 6945-6952 (2003)

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